Article Object
(
    [_status:protected] => Array
        (
            [0] => 已发布
            [1] => 草稿
            [2] => 禁用
            [3] => 已审核
            [4] => 已回收
        )

    [_sticky:protected] => Array
        (
            [0] => 否
            [1] => 置顶
        )

    [_md:CActiveRecord:private] => CActiveRecordMetaData Object
        (
            [tableSchema] => CMysqlTableSchema Object
                (
                    [schemaName] => 
                    [name] => article
                    [rawName] => `article`
                    [primaryKey] => id
                    [sequenceName] => 
                    [foreignKeys] => Array
                        (
                        )

                    [columns] => Array
                        (
                            [id] => CMysqlColumnSchema Object
                                (
                                    [name] => id
                                    [rawName] => `id`
                                    [allowNull] => 
                                    [dbType] => int(10) unsigned
                                    [type] => string
                                    [defaultValue] => 
                                    [size] => 10
                                    [precision] => 10
                                    [scale] => 
                                    [isPrimaryKey] => 1
                                    [isForeignKey] => 
                                    [autoIncrement] => 1
                                    [comment] => 
                                    [_e:CComponent:private] => 
                                    [_m:CComponent:private] => 
                                )

                            [sort_id] => CMysqlColumnSchema Object
                                (
                                    [name] => sort_id
                                    [rawName] => `sort_id`
                                    [allowNull] => 
                                    [dbType] => smallint(6) unsigned
                                    [type] => integer
                                    [defaultValue] => 0
                                    [size] => 6
                                    [precision] => 6
                                    [scale] => 
                                    [isPrimaryKey] => 
                                    [isForeignKey] => 
                                    [autoIncrement] => 
                                    [comment] => 分类id
                                    [_e:CComponent:private] => 
                                    [_m:CComponent:private] => 
                                )

                            [title] => CMysqlColumnSchema Object
                                (
                                    [name] => title
                                    [rawName] => `title`
                                    [allowNull] => 1
                                    [dbType] => varchar(255)
                                    [type] => string
                                    [defaultValue] => 
                                    [size] => 255
                                    [precision] => 255
                                    [scale] => 
                                    [isPrimaryKey] => 
                                    [isForeignKey] => 
                                    [autoIncrement] => 
                                    [comment] => 标题
                                    [_e:CComponent:private] => 
                                    [_m:CComponent:private] => 
                                )

                            [title_pic] => CMysqlColumnSchema Object
                                (
                                    [name] => title_pic
                                    [rawName] => `title_pic`
                                    [allowNull] => 1
                                    [dbType] => varchar(255)
                                    [type] => string
                                    [defaultValue] => 
                                    [size] => 255
                                    [precision] => 255
                                    [scale] => 
                                    [isPrimaryKey] => 
                                    [isForeignKey] => 
                                    [autoIncrement] => 
                                    [comment] => 标题图片
                                    [_e:CComponent:private] => 
                                    [_m:CComponent:private] => 
                                )

                            [intro] => CMysqlColumnSchema Object
                                (
                                    [name] => intro
                                    [rawName] => `intro`
                                    [allowNull] => 1
                                    [dbType] => text
                                    [type] => string
                                    [defaultValue] => 
                                    [size] => 
                                    [precision] => 
                                    [scale] => 
                                    [isPrimaryKey] => 
                                    [isForeignKey] => 
                                    [autoIncrement] => 
                                    [comment] => 简介
                                    [_e:CComponent:private] => 
                                    [_m:CComponent:private] => 
                                )

                            [source] => CMysqlColumnSchema Object
                                (
                                    [name] => source
                                    [rawName] => `source`
                                    [allowNull] => 1
                                    [dbType] => varchar(255)
                                    [type] => string
                                    [defaultValue] => 
                                    [size] => 255
                                    [precision] => 255
                                    [scale] => 
                                    [isPrimaryKey] => 
                                    [isForeignKey] => 
                                    [autoIncrement] => 
                                    [comment] => 来源
                                    [_e:CComponent:private] => 
                                    [_m:CComponent:private] => 
                                )

                            [source_link] => CMysqlColumnSchema Object
                                (
                                    [name] => source_link
                                    [rawName] => `source_link`
                                    [allowNull] => 1
                                    [dbType] => varchar(255)
                                    [type] => string
                                    [defaultValue] => 
                                    [size] => 255
                                    [precision] => 255
                                    [scale] => 
                                    [isPrimaryKey] => 
                                    [isForeignKey] => 
                                    [autoIncrement] => 
                                    [comment] => 来源链接
                                    [_e:CComponent:private] => 
                                    [_m:CComponent:private] => 
                                )

                            [author] => CMysqlColumnSchema Object
                                (
                                    [name] => author
                                    [rawName] => `author`
                                    [allowNull] => 1
                                    [dbType] => varchar(255)
                                    [type] => string
                                    [defaultValue] => 
                                    [size] => 255
                                    [precision] => 255
                                    [scale] => 
                                    [isPrimaryKey] => 
                                    [isForeignKey] => 
                                    [autoIncrement] => 
                                    [comment] => 作者
                                    [_e:CComponent:private] => 
                                    [_m:CComponent:private] => 
                                )

                            [editor] => CMysqlColumnSchema Object
                                (
                                    [name] => editor
                                    [rawName] => `editor`
                                    [allowNull] => 1
                                    [dbType] => varchar(255)
                                    [type] => string
                                    [defaultValue] => 
                                    [size] => 255
                                    [precision] => 255
                                    [scale] => 
                                    [isPrimaryKey] => 
                                    [isForeignKey] => 
                                    [autoIncrement] => 
                                    [comment] => 编辑
                                    [_e:CComponent:private] => 
                                    [_m:CComponent:private] => 
                                )

                            [admin_id] => CMysqlColumnSchema Object
                                (
                                    [name] => admin_id
                                    [rawName] => `admin_id`
                                    [allowNull] => 
                                    [dbType] => int(10) unsigned
                                    [type] => string
                                    [defaultValue] => 0
                                    [size] => 10
                                    [precision] => 10
                                    [scale] => 
                                    [isPrimaryKey] => 
                                    [isForeignKey] => 
                                    [autoIncrement] => 
                                    [comment] => 管理员id
                                    [_e:CComponent:private] => 
                                    [_m:CComponent:private] => 
                                )

                            [content] => CMysqlColumnSchema Object
                                (
                                    [name] => content
                                    [rawName] => `content`
                                    [allowNull] => 1
                                    [dbType] => text
                                    [type] => string
                                    [defaultValue] => 
                                    [size] => 
                                    [precision] => 
                                    [scale] => 
                                    [isPrimaryKey] => 
                                    [isForeignKey] => 
                                    [autoIncrement] => 
                                    [comment] => 内容
                                    [_e:CComponent:private] => 
                                    [_m:CComponent:private] => 
                                )

                            [created_at] => CMysqlColumnSchema Object
                                (
                                    [name] => created_at
                                    [rawName] => `created_at`
                                    [allowNull] => 
                                    [dbType] => datetime
                                    [type] => string
                                    [defaultValue] => 0000-00-00 00:00:00
                                    [size] => 
                                    [precision] => 
                                    [scale] => 
                                    [isPrimaryKey] => 
                                    [isForeignKey] => 
                                    [autoIncrement] => 
                                    [comment] => 创建日期
                                    [_e:CComponent:private] => 
                                    [_m:CComponent:private] => 
                                )

                            [updated_at] => CMysqlColumnSchema Object
                                (
                                    [name] => updated_at
                                    [rawName] => `updated_at`
                                    [allowNull] => 
                                    [dbType] => datetime
                                    [type] => string
                                    [defaultValue] => 0000-00-00 00:00:00
                                    [size] => 
                                    [precision] => 
                                    [scale] => 
                                    [isPrimaryKey] => 
                                    [isForeignKey] => 
                                    [autoIncrement] => 
                                    [comment] => 更新日期
                                    [_e:CComponent:private] => 
                                    [_m:CComponent:private] => 
                                )

                            [published_at] => CMysqlColumnSchema Object
                                (
                                    [name] => published_at
                                    [rawName] => `published_at`
                                    [allowNull] => 
                                    [dbType] => datetime
                                    [type] => string
                                    [defaultValue] => 0000-00-00 00:00:00
                                    [size] => 
                                    [precision] => 
                                    [scale] => 
                                    [isPrimaryKey] => 
                                    [isForeignKey] => 
                                    [autoIncrement] => 
                                    [comment] => 发布日期
                                    [_e:CComponent:private] => 
                                    [_m:CComponent:private] => 
                                )

                            [status] => CMysqlColumnSchema Object
                                (
                                    [name] => status
                                    [rawName] => `status`
                                    [allowNull] => 
                                    [dbType] => tinyint(1) unsigned
                                    [type] => integer
                                    [defaultValue] => 0
                                    [size] => 1
                                    [precision] => 1
                                    [scale] => 
                                    [isPrimaryKey] => 
                                    [isForeignKey] => 
                                    [autoIncrement] => 
                                    [comment] => 状态
                                    [_e:CComponent:private] => 
                                    [_m:CComponent:private] => 
                                )

                            [sticky] => CMysqlColumnSchema Object
                                (
                                    [name] => sticky
                                    [rawName] => `sticky`
                                    [allowNull] => 
                                    [dbType] => tinyint(1) unsigned
                                    [type] => integer
                                    [defaultValue] => 0
                                    [size] => 1
                                    [precision] => 1
                                    [scale] => 
                                    [isPrimaryKey] => 
                                    [isForeignKey] => 
                                    [autoIncrement] => 
                                    [comment] => 推荐
                                    [_e:CComponent:private] => 
                                    [_m:CComponent:private] => 
                                )

                            [display_order] => CMysqlColumnSchema Object
                                (
                                    [name] => display_order
                                    [rawName] => `display_order`
                                    [allowNull] => 
                                    [dbType] => smallint(6) unsigned
                                    [type] => integer
                                    [defaultValue] => 0
                                    [size] => 6
                                    [precision] => 6
                                    [scale] => 
                                    [isPrimaryKey] => 
                                    [isForeignKey] => 
                                    [autoIncrement] => 
                                    [comment] => 排序
                                    [_e:CComponent:private] => 
                                    [_m:CComponent:private] => 
                                )

                            [article_type] => CMysqlColumnSchema Object
                                (
                                    [name] => article_type
                                    [rawName] => `article_type`
                                    [allowNull] => 1
                                    [dbType] => varchar(255)
                                    [type] => string
                                    [defaultValue] => 
                                    [size] => 255
                                    [precision] => 255
                                    [scale] => 
                                    [isPrimaryKey] => 
                                    [isForeignKey] => 
                                    [autoIncrement] => 
                                    [comment] => 文章类型
                                    [_e:CComponent:private] => 
                                    [_m:CComponent:private] => 
                                )

                            [language] => CMysqlColumnSchema Object
                                (
                                    [name] => language
                                    [rawName] => `language`
                                    [allowNull] => 1
                                    [dbType] => varchar(20)
                                    [type] => string
                                    [defaultValue] => 
                                    [size] => 20
                                    [precision] => 20
                                    [scale] => 
                                    [isPrimaryKey] => 
                                    [isForeignKey] => 
                                    [autoIncrement] => 
                                    [comment] => 
                                    [_e:CComponent:private] => 
                                    [_m:CComponent:private] => 
                                )

                            [subtitle] => CMysqlColumnSchema Object
                                (
                                    [name] => subtitle
                                    [rawName] => `subtitle`
                                    [allowNull] => 1
                                    [dbType] => varchar(255)
                                    [type] => string
                                    [defaultValue] => 
                                    [size] => 255
                                    [precision] => 255
                                    [scale] => 
                                    [isPrimaryKey] => 
                                    [isForeignKey] => 
                                    [autoIncrement] => 
                                    [comment] => 
                                    [_e:CComponent:private] => 
                                    [_m:CComponent:private] => 
                                )

                            [file] => CMysqlColumnSchema Object
                                (
                                    [name] => file
                                    [rawName] => `file`
                                    [allowNull] => 1
                                    [dbType] => varchar(255)
                                    [type] => string
                                    [defaultValue] => 
                                    [size] => 255
                                    [precision] => 255
                                    [scale] => 
                                    [isPrimaryKey] => 
                                    [isForeignKey] => 
                                    [autoIncrement] => 
                                    [comment] => 
                                    [_e:CComponent:private] => 
                                    [_m:CComponent:private] => 
                                )

                            [is_oauth] => CMysqlColumnSchema Object
                                (
                                    [name] => is_oauth
                                    [rawName] => `is_oauth`
                                    [allowNull] => 
                                    [dbType] => tinyint(1) unsigned
                                    [type] => integer
                                    [defaultValue] => 0
                                    [size] => 1
                                    [precision] => 1
                                    [scale] => 
                                    [isPrimaryKey] => 
                                    [isForeignKey] => 
                                    [autoIncrement] => 
                                    [comment] => 是否需要认证(0为不限制)
                                    [_e:CComponent:private] => 
                                    [_m:CComponent:private] => 
                                )

                            [is_highlight] => CMysqlColumnSchema Object
                                (
                                    [name] => is_highlight
                                    [rawName] => `is_highlight`
                                    [allowNull] => 
                                    [dbType] => tinyint(1) unsigned
                                    [type] => integer
                                    [defaultValue] => 0
                                    [size] => 1
                                    [precision] => 1
                                    [scale] => 
                                    [isPrimaryKey] => 
                                    [isForeignKey] => 
                                    [autoIncrement] => 
                                    [comment] => 是否高亮
                                    [_e:CComponent:private] => 
                                    [_m:CComponent:private] => 
                                )

                        )

                    [_e:CComponent:private] => 
                    [_m:CComponent:private] => 
                )

            [columns] => Array
                (
                    [id] => CMysqlColumnSchema Object
                        (
                            [name] => id
                            [rawName] => `id`
                            [allowNull] => 
                            [dbType] => int(10) unsigned
                            [type] => string
                            [defaultValue] => 
                            [size] => 10
                            [precision] => 10
                            [scale] => 
                            [isPrimaryKey] => 1
                            [isForeignKey] => 
                            [autoIncrement] => 1
                            [comment] => 
                            [_e:CComponent:private] => 
                            [_m:CComponent:private] => 
                        )

                    [sort_id] => CMysqlColumnSchema Object
                        (
                            [name] => sort_id
                            [rawName] => `sort_id`
                            [allowNull] => 
                            [dbType] => smallint(6) unsigned
                            [type] => integer
                            [defaultValue] => 0
                            [size] => 6
                            [precision] => 6
                            [scale] => 
                            [isPrimaryKey] => 
                            [isForeignKey] => 
                            [autoIncrement] => 
                            [comment] => 分类id
                            [_e:CComponent:private] => 
                            [_m:CComponent:private] => 
                        )

                    [title] => CMysqlColumnSchema Object
                        (
                            [name] => title
                            [rawName] => `title`
                            [allowNull] => 1
                            [dbType] => varchar(255)
                            [type] => string
                            [defaultValue] => 
                            [size] => 255
                            [precision] => 255
                            [scale] => 
                            [isPrimaryKey] => 
                            [isForeignKey] => 
                            [autoIncrement] => 
                            [comment] => 标题
                            [_e:CComponent:private] => 
                            [_m:CComponent:private] => 
                        )

                    [title_pic] => CMysqlColumnSchema Object
                        (
                            [name] => title_pic
                            [rawName] => `title_pic`
                            [allowNull] => 1
                            [dbType] => varchar(255)
                            [type] => string
                            [defaultValue] => 
                            [size] => 255
                            [precision] => 255
                            [scale] => 
                            [isPrimaryKey] => 
                            [isForeignKey] => 
                            [autoIncrement] => 
                            [comment] => 标题图片
                            [_e:CComponent:private] => 
                            [_m:CComponent:private] => 
                        )

                    [intro] => CMysqlColumnSchema Object
                        (
                            [name] => intro
                            [rawName] => `intro`
                            [allowNull] => 1
                            [dbType] => text
                            [type] => string
                            [defaultValue] => 
                            [size] => 
                            [precision] => 
                            [scale] => 
                            [isPrimaryKey] => 
                            [isForeignKey] => 
                            [autoIncrement] => 
                            [comment] => 简介
                            [_e:CComponent:private] => 
                            [_m:CComponent:private] => 
                        )

                    [source] => CMysqlColumnSchema Object
                        (
                            [name] => source
                            [rawName] => `source`
                            [allowNull] => 1
                            [dbType] => varchar(255)
                            [type] => string
                            [defaultValue] => 
                            [size] => 255
                            [precision] => 255
                            [scale] => 
                            [isPrimaryKey] => 
                            [isForeignKey] => 
                            [autoIncrement] => 
                            [comment] => 来源
                            [_e:CComponent:private] => 
                            [_m:CComponent:private] => 
                        )

                    [source_link] => CMysqlColumnSchema Object
                        (
                            [name] => source_link
                            [rawName] => `source_link`
                            [allowNull] => 1
                            [dbType] => varchar(255)
                            [type] => string
                            [defaultValue] => 
                            [size] => 255
                            [precision] => 255
                            [scale] => 
                            [isPrimaryKey] => 
                            [isForeignKey] => 
                            [autoIncrement] => 
                            [comment] => 来源链接
                            [_e:CComponent:private] => 
                            [_m:CComponent:private] => 
                        )

                    [author] => CMysqlColumnSchema Object
                        (
                            [name] => author
                            [rawName] => `author`
                            [allowNull] => 1
                            [dbType] => varchar(255)
                            [type] => string
                            [defaultValue] => 
                            [size] => 255
                            [precision] => 255
                            [scale] => 
                            [isPrimaryKey] => 
                            [isForeignKey] => 
                            [autoIncrement] => 
                            [comment] => 作者
                            [_e:CComponent:private] => 
                            [_m:CComponent:private] => 
                        )

                    [editor] => CMysqlColumnSchema Object
                        (
                            [name] => editor
                            [rawName] => `editor`
                            [allowNull] => 1
                            [dbType] => varchar(255)
                            [type] => string
                            [defaultValue] => 
                            [size] => 255
                            [precision] => 255
                            [scale] => 
                            [isPrimaryKey] => 
                            [isForeignKey] => 
                            [autoIncrement] => 
                            [comment] => 编辑
                            [_e:CComponent:private] => 
                            [_m:CComponent:private] => 
                        )

                    [admin_id] => CMysqlColumnSchema Object
                        (
                            [name] => admin_id
                            [rawName] => `admin_id`
                            [allowNull] => 
                            [dbType] => int(10) unsigned
                            [type] => string
                            [defaultValue] => 0
                            [size] => 10
                            [precision] => 10
                            [scale] => 
                            [isPrimaryKey] => 
                            [isForeignKey] => 
                            [autoIncrement] => 
                            [comment] => 管理员id
                            [_e:CComponent:private] => 
                            [_m:CComponent:private] => 
                        )

                    [content] => CMysqlColumnSchema Object
                        (
                            [name] => content
                            [rawName] => `content`
                            [allowNull] => 1
                            [dbType] => text
                            [type] => string
                            [defaultValue] => 
                            [size] => 
                            [precision] => 
                            [scale] => 
                            [isPrimaryKey] => 
                            [isForeignKey] => 
                            [autoIncrement] => 
                            [comment] => 内容
                            [_e:CComponent:private] => 
                            [_m:CComponent:private] => 
                        )

                    [created_at] => CMysqlColumnSchema Object
                        (
                            [name] => created_at
                            [rawName] => `created_at`
                            [allowNull] => 
                            [dbType] => datetime
                            [type] => string
                            [defaultValue] => 0000-00-00 00:00:00
                            [size] => 
                            [precision] => 
                            [scale] => 
                            [isPrimaryKey] => 
                            [isForeignKey] => 
                            [autoIncrement] => 
                            [comment] => 创建日期
                            [_e:CComponent:private] => 
                            [_m:CComponent:private] => 
                        )

                    [updated_at] => CMysqlColumnSchema Object
                        (
                            [name] => updated_at
                            [rawName] => `updated_at`
                            [allowNull] => 
                            [dbType] => datetime
                            [type] => string
                            [defaultValue] => 0000-00-00 00:00:00
                            [size] => 
                            [precision] => 
                            [scale] => 
                            [isPrimaryKey] => 
                            [isForeignKey] => 
                            [autoIncrement] => 
                            [comment] => 更新日期
                            [_e:CComponent:private] => 
                            [_m:CComponent:private] => 
                        )

                    [published_at] => CMysqlColumnSchema Object
                        (
                            [name] => published_at
                            [rawName] => `published_at`
                            [allowNull] => 
                            [dbType] => datetime
                            [type] => string
                            [defaultValue] => 0000-00-00 00:00:00
                            [size] => 
                            [precision] => 
                            [scale] => 
                            [isPrimaryKey] => 
                            [isForeignKey] => 
                            [autoIncrement] => 
                            [comment] => 发布日期
                            [_e:CComponent:private] => 
                            [_m:CComponent:private] => 
                        )

                    [status] => CMysqlColumnSchema Object
                        (
                            [name] => status
                            [rawName] => `status`
                            [allowNull] => 
                            [dbType] => tinyint(1) unsigned
                            [type] => integer
                            [defaultValue] => 0
                            [size] => 1
                            [precision] => 1
                            [scale] => 
                            [isPrimaryKey] => 
                            [isForeignKey] => 
                            [autoIncrement] => 
                            [comment] => 状态
                            [_e:CComponent:private] => 
                            [_m:CComponent:private] => 
                        )

                    [sticky] => CMysqlColumnSchema Object
                        (
                            [name] => sticky
                            [rawName] => `sticky`
                            [allowNull] => 
                            [dbType] => tinyint(1) unsigned
                            [type] => integer
                            [defaultValue] => 0
                            [size] => 1
                            [precision] => 1
                            [scale] => 
                            [isPrimaryKey] => 
                            [isForeignKey] => 
                            [autoIncrement] => 
                            [comment] => 推荐
                            [_e:CComponent:private] => 
                            [_m:CComponent:private] => 
                        )

                    [display_order] => CMysqlColumnSchema Object
                        (
                            [name] => display_order
                            [rawName] => `display_order`
                            [allowNull] => 
                            [dbType] => smallint(6) unsigned
                            [type] => integer
                            [defaultValue] => 0
                            [size] => 6
                            [precision] => 6
                            [scale] => 
                            [isPrimaryKey] => 
                            [isForeignKey] => 
                            [autoIncrement] => 
                            [comment] => 排序
                            [_e:CComponent:private] => 
                            [_m:CComponent:private] => 
                        )

                    [article_type] => CMysqlColumnSchema Object
                        (
                            [name] => article_type
                            [rawName] => `article_type`
                            [allowNull] => 1
                            [dbType] => varchar(255)
                            [type] => string
                            [defaultValue] => 
                            [size] => 255
                            [precision] => 255
                            [scale] => 
                            [isPrimaryKey] => 
                            [isForeignKey] => 
                            [autoIncrement] => 
                            [comment] => 文章类型
                            [_e:CComponent:private] => 
                            [_m:CComponent:private] => 
                        )

                    [language] => CMysqlColumnSchema Object
                        (
                            [name] => language
                            [rawName] => `language`
                            [allowNull] => 1
                            [dbType] => varchar(20)
                            [type] => string
                            [defaultValue] => 
                            [size] => 20
                            [precision] => 20
                            [scale] => 
                            [isPrimaryKey] => 
                            [isForeignKey] => 
                            [autoIncrement] => 
                            [comment] => 
                            [_e:CComponent:private] => 
                            [_m:CComponent:private] => 
                        )

                    [subtitle] => CMysqlColumnSchema Object
                        (
                            [name] => subtitle
                            [rawName] => `subtitle`
                            [allowNull] => 1
                            [dbType] => varchar(255)
                            [type] => string
                            [defaultValue] => 
                            [size] => 255
                            [precision] => 255
                            [scale] => 
                            [isPrimaryKey] => 
                            [isForeignKey] => 
                            [autoIncrement] => 
                            [comment] => 
                            [_e:CComponent:private] => 
                            [_m:CComponent:private] => 
                        )

                    [file] => CMysqlColumnSchema Object
                        (
                            [name] => file
                            [rawName] => `file`
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            [id] => 4754
            [title] => 化学系定制多重方式在线检测高分辨质谱采购项目采购需求公示
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            [published_at] => 2020-03-24 19:37:01
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SUSTC-招标信息
重大项目采购需求公示

双生长室分子束外延生长系统采购项目采购需求公示

2020-03-17

(一)项目基本信息

项目名称

双生长室分子束外延生长系统采购

采购预算(元)

15,300,000.00

是否接受进口设备

(二)货物清单

序号

设备名称

数量

单位

1

双生长室分子束外延生长系统

1

(三)商务需求

序号

商务需求

1

交货期的要求:签订合同并获得出口许可证后365天内

2

质保期: 1年

3

付款方式:合同生效并收到相应发票后支付合同总额的30%作为进度款;设备到达指定安装现场且安装、调试验收合格并提供全额发票后支付合同总额的65%;余款5%待质保期满且无质量问题并经学校确认后支付。

(四)技术需求

序号

设备名称

技术参数或功能要求

1

双生长室分子束外延生长系统

主要技术指标:

整套MBE系统由6个主要部分组成,分别是快速进样室(Loadlock chamber)、缓冲室(Buffer chamber)、掩膜装配室(Mask station)、预处理室(preparation chamber)和两个生长室(Growth chamber)。

整套系统配备烘烤罩,烘烤温度不低于150℃。可编程实现自动程序烘烤。系统具有紧急停机功能,真空互锁功能,分子泵断电自我保护等功能。

1.1快速进样室

  1. 304L或以上等级不锈钢真空腔体,包括必须的法兰口,比如泵接口、观察窗口、快开门接口、真空计接口、超高真空闸板阀接口等。
  1. 配置抽速不小于265 l/s的分子泵和配套的前级干泵,本底真空优于5×10-8 mbar。
  1. 配备衬底除气装置,最高除气温度不低于150℃。
  1. 配备具有至少6个存储位置的样品小车或存储台,可存储4英寸衬底托。
  1. 配备快开门,氟橡胶(Viton)密封。
  1. 配备冷阴极真空计,量程从大气压到5×10-9 mbar。
  1. 快速进样室与缓冲室之间配备手动闸板阀。
  1. ▲配备一个4只手套的手套箱,和快速进样室相连,样品通过手套箱进样。
  1. 缓冲室
  1. 304L或以上等级不锈钢真空腔体,采用线性圆柱形设计,包括必须的法兰口,比如泵接口、观察窗口、真空计接口、超高真空闸板阀接口等。
  1. ▲线性缓冲室长度不少于4米,具备至少连接两个MBE生长腔、一个Mask装配腔和一个预处理室的能力,并且采用模块化设计,未来可以扩展以连接更多腔体。
  1. ▲配置至少2台抽速不小于500 l/s的离子泵和1台抽速不小于1000 l/s的钛升华泵,包括相应的电源和控制器。缓冲室本底真空度优于2×10-10 mbar。
  1. 配备铱双灯丝离子规真空计及其控制器。
  1. 需设计有应力补偿装置,用于补偿释放烘烤时产生的应力。
  1. 配备从缓冲室至2个MBE生长室、Mask装配腔和预处理室的样品传输装置,包括4个磁力传输杆和对应的准直调节装置。
  1. 配备1个超高真空样品传送小车,小车可装载6片4英寸样品托。该小车通过磁力耦合的方式进行传动。该磁耦合传输机构需详细说明。
  1. 缓冲室需预留一个接口,可以用来连接超高真空样品转移腔,并且该位置有一个可以将Flag-style旗形样品托从4英寸样品托取出的机构,包括必须的wobblestick机械手及其他辅助装置。需对该机构设计提供技术支持材料。
  1. 掩膜装配室
  1. 304L或以上等级不锈钢真空腔体,该腔体和Buffer缓冲室相连接。
  1. 该腔体配置必要的操纵装置,包括特制的衬底顶针以及衬底伸缩装置,可实现在超高真空环境下更换样品或者样品托,从而避免不同生长室材料之间的互相污染。
  1. ▲该腔体配置必要的装置,包括可上下升降的具有3个存储位置的存储台和特制的机械手(Wobblestick),可实现在超高真空环境下为样品加装或者更换掩膜板,从而实现图形化的材料生长。要求可以实现掩膜板的翻转。
  1. 配备至少3块钽制作的掩膜板托,可装载和传输特殊的用Si或者GaAs制作的掩膜板。
  1. 配备至少3块特制的衬底样品托,用于和掩膜板的组装。
  1. ▲供应商需提供技术支持资料对该腔体的机构加以说明。并提供实际案例,有公开结果支持可以实现百纳米(<200 nm)图形尺寸。
  1. 生长室(1)
  1. 304L或以上等级不锈钢真空腔体,内径不小于550 mm。包括至少2个DN 250 CF法兰口(用于安装电子束蒸发源),4个DN 100 CF和4个DN 63 CF法兰口(安装K-cell或者电子束蒸发源),以及用于其他功能的法兰口(包括真空泵浦系统、RHEED、 荧光屏、样品传输、RGA、石英晶振膜厚仪、样品架、观察窗等)。
  1. 腔体内部配备液氮冷屏,低温泵抽口处有与冷屏相连的挡板设计,以保护泵免受高挥发元素的影响。
  1. 在源炉之间安装双层结构隔板,防止交叉污染和温度交叉干扰。
  1. ▲配置抽速不小于1500 l/s的低温泵,要求采用低振动噪音型号,和抽速不小于500 l/s的离子泵及钛升华泵,本底真空度优于6×10-11 mbar。
  1. 生长室腔体中装有铱双灯丝离子规真空计及其控制器,测量范围从10-5到3×10-11mbar。
  1. 低温泵与生长室腔体之间配备气动闸板阀,带位置感应器,具备紧急情况下关闭功能。
  1. 配备衬底操纵台,采用高纯W材质加热器,对于Si衬底加热温度不低于1000℃,包括配套的加热电源和PID温控。最大可加热衬底尺寸为4英寸,向下兼容小尺寸衬底,可兼容旗形样品托。
  1. 衬底具备磁力耦合旋转功能,转速0-30 rpm可调,包括配套的旋转控制器。
  1. 衬底具备上下至少25 mm的调节距离,用于样品传输。衬底正面朝下。
  1. 衬底前端带有挡板,软件控制马达驱动,开合角度90°
  1. 提供至少6片Mo制作的衬底载盘,样品托具体的规格由最终用户确定。
  1. ▲配备RHEED原位监控系统,包括15 keV电子枪、荧光屏和观察窗挡板,并包括配套的图像采集CCD和分析软件。电子枪能量范围500 eV-15 keV,最大电流不低于30 μA,电子束斑不大于70μm,电子束具备偏转能力,偏转角度±15°。并具备远程控制功能,可远程控制电子束聚焦和偏转。
  1. 配备石英晶振膜厚仪,包括配套的控制器。石英晶振膜厚仪需安装于单独的小腔中,与主腔体采用手动闸板阀相连,能实现替换石英晶体而不影响主腔体高真空。需提供该部分的详细设计方案。
  1. ▲配备1套从水平方向安装的多坩埚电子束蒸发源,坩埚数量不少于6个,每个坩埚容量不小于15 ccm,配套电源最大输出功率不低于3 kW,可用于蒸发所有高熔点金属。电子枪采用e型电子枪,电子束270°偏转角度设计。电子束蒸发源设计适合于UHV(超高真空)应用,可长时间稳定蒸发高熔点材料。最高可烘烤温度不低于200℃。坩埚的选择由马达驱动。电子束蒸发源集成有水冷管道,并配备程序控制的线性挡板。挡板开关时间不大于200 ms。
  1. 电子束蒸发源配套有单独的观察窗,或是其它特殊设计观察窗,可清晰监控电子束蒸发源炉的电子束位置和蒸发状态。观察窗配有挡板。
  1. 配备1套电子束蒸发源工作所需的配套电源,包括高压电源、灯丝电源和控制器。高压电源功率不小于3 kW。高压电源需具备电弧检测和抑制功能,反应时间不大于1μs 。电子束可通过操纵杆进行远程控制X、Y扫描,并带有LCD显示。
  1. ▲电子束蒸发源需配备原位束流即时监控系统,用于精确控制电子束蒸发源的元素蒸发,包括一套四级杆质谱仪及其控制器(质量数1-200 amu),PID控制器以及与电子束蒸发源电源相连的循环反馈回路,电子束蒸发元素束流控制稳定度优于1%。要求四级杆质谱仪同时可用于真空检漏和残余气体分析。
  1. ▲该束流监控系统的设计和工作原理需详细描述,并且提供对某种材料的实际监控测试结果-束流稳定性曲线。
  1. ▲配备3个双温区热丝蒸发源。采用Ta加热丝,最高工作温度不低于1400℃,控温精度±0.1℃,恒温时温度稳定性优于±0.1℃。采用PBN坩埚,坩埚容量不小于35 cc。包括配套的电源,PID温控,水冷罩和马达驱动磁力耦合的线性挡板。
  1. ▲配备2个高温区蒸发源。采用W加热丝,最高工作温度不低于1700℃,控温精度±0.1℃,恒温时温度稳定性优于±0.1℃。采用Al2O3坩埚,坩埚容量不小于25 cc。包括配套的电源,PID温控,水冷罩和马达驱动磁力耦合的线性位移挡板。
  1. ▲配备2套双温区热裂解源(thermal cracker)。装料区和裂解区全部采用PBN制造。坩埚容量不小于130 cc。包括2套配套的电源,PID温控,集成水冷罩和程序控制旋转式挡板,挡板开关时间不大于200 ms。装料池加热温度不低于600 ℃,裂解口加热温度不低于1200 ℃。装料池处温度稳定性优于±0.1 ℃,裂解口处温度稳定性优于±0.1 ℃。
  1. ▲热裂解源炉要求裂解区温度和装料区温度可独立控制,无互相干扰,需提供设计说明以及不同温区实测温度曲线。
  1. ▲配备一套蒸发Se的阀控裂解源(valved cracker),装料池容积不小于300 cc,包括2套配套的电源和PID温控,集成水冷罩以及伺服马达驱动的阀门及其控制器。装料池最高加热温度不低于400 ℃,裂解口最高加热温度不低于1100 ℃。装料池处温度稳定性优于±0.1 ℃,裂解口处温度稳定性优于±0.1 ℃。需配备马达驱动磁力耦合的线性位移挡板。
  1. ▲配备一套蒸发As的阀控裂解源(valved cracker),装料池容积不小于300 cc,包括2套配套的电源和PID温控,集成水冷罩以及伺服马达驱动的阀门及其控制器。装料池最高加热温度不低于500 ℃,裂解口最高加热温度不低于1200 ℃。装料池处温度稳定性优于±0.1 ℃,裂解口处温度稳定性优于±0.1 ℃。需配备马达驱动磁力耦合的线性位移挡板。
  1. ▲所提供的阀控裂解源阀门具有防堵功能。阀门设计需详细说明,并阐述其防堵功能。As裂解源炉阀门开关状态时束流差异须至少有2个数量级,需提供阀门开关时束流曲线。
  1. ▲要求该系统中所有蒸发源配备的挡板需考虑在运动过程中尽量减少或避免颗粒掉落,挡板具体设计需详细说明。
  1. 配备1个12通道的挡板控制器,可同时控制12个挡板动作。
  1. 具备冷却水控制面板,每个水路均需配水流量计,实时监测水流状态,当水流量降低时,各源炉电功率自动下降以保护源炉。
  1. ▲包括一套独立的MBE系统控制软件和工艺控制软件,含配套PC及硬件。样品生长过程以由软件控制,包括衬底温度、源炉挡板、衬底旋转,以及真空泵组的控制等。系统控制软件同时可以显示所有腔室的真空度。用户可以利用工艺软件对生长工艺过程进行编程,实现程序化的自动生长。
  1. 随系统提供一套小型应急设备,用于在突然停电时维持和保护系统关键部件(比如关键的泵和源炉),持续时间不少于30 min。
  1. 生长室(2)
  1. 304L或以上等级不锈钢真空腔体,内径不小于550 mm。包括至少2个DN 250 CF法兰口(用于安装电子束蒸发源),4个DN 100 CF和4个DN 63 CF法兰口(安装K-cell或者电子束蒸发源),以及用于其他功能的法兰口(包括真空泵浦系统、RHEED、 荧光屏、样品传输、RGA、石英晶振膜厚仪、样品架、观察窗等)。
  1. 腔体内部配备液氮冷屏,低温泵抽口处有与冷屏相连的挡板设计,以保护泵免受高挥发元素的影响。
  1. 在源炉之间安装双层结构隔板,防止交叉污染和温度交叉干扰。
  1. ▲配置抽速不小于1500 l/s的低温泵,要求采用低振动噪音型号,和抽速不小于500 l/s的离子泵及钛升华泵,本底真空度优于6×10-11 mbar。
  1. 生长室腔体中装有铱双灯丝离子规真空计及其控制器,测量范围从10-5到3×10-11mbar。
  1. 低温泵与生长室腔体之间配备气动闸板阀,带位置感应器,具备紧急情况下关闭功能。
  1. 配备衬底操纵台,采用高纯W材质加热器,对于Si衬底加热温度不低于1000℃,包括配套的加热电源和PID温控。最大可加热衬底尺寸为4英寸,向下兼容小尺寸衬底,可兼容旗形样品托。
  1. 衬底具备磁力耦合旋转功能,转速0-30 rpm可调,包括配套的旋转控制器。
  1. 衬底具备上下至少25 mm的调节距离,用于样品传输。衬底正面朝下。
  1. 衬底前端带有挡板,软件控制马达驱动,开合角度90°。
  1. 提供至少6片Mo制作的衬底载盘,样品托具体的规格由最终用户确定。
  1. ▲配备单独的样品冷台,由液氮直接冷却,带PID温控,可实现100 K至室温温度可控调节。需提供该部分的详细设计方案。
  1. ▲配备RHEED原位监控系统,包括15 keV电子枪、荧光屏和观察窗挡板,并包括配套的图像采集CCD和分析软件。电子枪能量范围500 eV-15 keV,最大电流不低于30 μA,电子束斑不大于70μm,电子束具备偏转能力,偏转角度±15°。并具备远程控制功能,可远程控制电子束聚焦和偏转。
  1. 配备石英晶振膜厚仪,包括配套的控制器。石英晶振膜厚仪需安装于单独的小腔中,与主腔体采用手动闸板阀相连,能实现替换石英晶体而不影响主腔体高真空。需提供该部分的详细设计方案。
  1. ▲配备1套从水平方向安装的多坩埚电子束蒸发源,坩埚数量不少于6个,每个坩埚容量不小于15 cc,配套电源最大输出功率不低于3 kW,可用于蒸发所有高熔点金属。电子枪采用e型电子枪,电子束270°偏转角度设计。电子束蒸发源设计适合于UHV(超高真空)应用,可长时间稳定蒸发高熔点材料。最高可烘烤温度不低于200℃。坩埚的选择由马达驱动。电子束蒸发源集成有水冷管道,并配备程序控制的线性挡板。挡板开关时间不大于200 ms。
  1. 电子束蒸发源配套有单独的观察窗,或是其它特殊设计观察窗,可清晰监控电子束蒸发源炉的电子束位置和蒸发状态。观察窗配有挡板。
  1. 配备1套电子束蒸发源工作所需的配套电源,包括高压电源、灯丝电源和控制器。高压电源功率不小于3 kW。高压电源需具备电弧检测和抑制功能,反应时间不大于1μs 。电子束可通过操纵杆进行远程控制X、Y扫描,并带有LCD显示。
  1. 电子束蒸发源需配备原位束流即时监控系统,用于精确控制电子束蒸发源的元素蒸发,包括一套四级杆质谱仪及其控制器(质量数1-200 amu),PID控制器以及与电子束蒸发源电源相连的循环反馈回路,电子束蒸发元素束流控制稳定度优于1%。要求四级杆质谱仪同时可用于真空检漏和残余气体分析。
  1. 该束流监控系统的设计和工作原理需详细描述,并且提供对某种材料的实际监控测试结果-束流稳定性曲线。
  1. 配备1个中温区蒸发源。采用Ta加热丝冷唇设计,最高工作温度不低于1400℃,控温精度±0.1℃,恒温时温度稳定性优于±0.1℃。采用双层PBN坩埚,坩埚容量为35 cc。包括配套的电源,PID温控,水冷罩和马达驱动磁力耦合的线性位移挡板。
  1. 要求该系统中所有蒸发源配备的挡板需考虑在运动过程中尽量减少或避免颗粒掉落,挡板具体设计需详细说明。
  1. 配备1个12通道的挡板控制器,可同时控制12个挡板动作。
  1. 具备冷却水控制面板,每个水路均需配水流量计,实时监测水流状态,当水流量降低时,各源炉电功率自动下降以保护源炉。
  1. ▲包括一套独立的MBE系统控制软件和工艺控制软件,含配套PC及硬件。样品生长过程以由软件控制,包括衬底温度、源炉挡板、衬底旋转,以及真空泵组的控制等。系统控制软件同时可以显示所有腔室的真空度。用户可以利用工艺软件对生长工艺过程进行编程,实现程序化的自动生长。
  1. 预处理室
  1. 需配备一个样品预处理腔体,该腔体包括一个集成水冷屏。该腔体和缓冲室生长室相连。
  1. 采用304L或以上等级不锈钢制造的真空腔体,包括观察窗口、预留升级原子氢源或者蒸发源的接口。
  1. 配置抽速不小于265 l/s的分子泵和配套的前级干泵。
  1. 腔体中装有铱双灯丝离子规真空计及其控制器,测量范围从10-5到3×10-11mbar。
  1. ▲配备衬底操纵台,采用W材质加热器,对于Si衬底加热温度不低于1000℃,包括配套的加热电源和PID温控。最大可加热衬底尺寸为4英寸,向下兼容小尺寸衬底,可兼容旗形样品托。
  1. 衬底具备上下至少25 mm的调节距离,用于样品传输。衬底正面朝下。
  1. ▲配备一个氩离子溅射枪,最高能量5 keV,最大束流20 μA。包括进气漏阀。

 

(五)公示期限

2020年3月17日至2020年3月22日

对公示内容有异议的,请在公示期内以书面形式将意见反馈至采购人。

联系人:吴老师

联系电话:0755-88015306

质疑投诉邮箱:zhaobzyts@sustech.edu.cn