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Article Object ( [_status:protected] => Array ( [0] => 已发布 [1] => 草稿 [2] => 禁用 [3] => 已审核 [4] => 已回收 ) [_sticky:protected] => Array ( [0] => 否 [1] => 置顶 ) [_md:CActiveRecord:private] => CActiveRecordMetaData Object ( [tableSchema] => CMysqlTableSchema Object ( [schemaName] => [name] => article [rawName] => `article` [primaryKey] => id [sequenceName] => [foreignKeys] => Array ( ) [columns] => Array ( [id] => CMysqlColumnSchema Object ( [name] => id [rawName] => `id` [allowNull] => [dbType] => int(10) unsigned [type] => string [defaultValue] => [size] => 10 [precision] => 10 [scale] => [isPrimaryKey] => 1 [isForeignKey] => [autoIncrement] => 1 [comment] => [_e:CComponent:private] => [_m:CComponent:private] => ) [sort_id] => CMysqlColumnSchema Object ( [name] => sort_id [rawName] => `sort_id` [allowNull] => [dbType] => smallint(6) unsigned [type] => integer [defaultValue] => 0 [size] => 6 [precision] => 6 [scale] => [isPrimaryKey] => [isForeignKey] => [autoIncrement] => [comment] => 分类id [_e:CComponent:private] => [_m:CComponent:private] => ) [title] => CMysqlColumnSchema Object ( [name] => title [rawName] => `title` [allowNull] => 1 [dbType] => varchar(255) [type] => string [defaultValue] => [size] => 255 [precision] => 255 [scale] => [isPrimaryKey] => [isForeignKey] => [autoIncrement] => [comment] => 标题 [_e:CComponent:private] => [_m:CComponent:private] => ) [title_pic] => CMysqlColumnSchema Object ( [name] => title_pic [rawName] => `title_pic` [allowNull] => 1 [dbType] => varchar(255) [type] => string [defaultValue] => [size] => 255 [precision] => 255 [scale] => [isPrimaryKey] => [isForeignKey] => [autoIncrement] => [comment] => 标题图片 [_e:CComponent:private] => [_m:CComponent:private] => ) [intro] => CMysqlColumnSchema Object ( [name] => intro [rawName] => `intro` [allowNull] => 1 [dbType] => text [type] => string [defaultValue] => [size] => [precision] => [scale] => [isPrimaryKey] => [isForeignKey] => [autoIncrement] => [comment] => 简介 [_e:CComponent:private] => [_m:CComponent:private] => ) [source] => CMysqlColumnSchema Object ( [name] => source [rawName] => `source` [allowNull] => 1 [dbType] => varchar(255) [type] => string [defaultValue] => [size] => 255 [precision] => 255 [scale] => [isPrimaryKey] => [isForeignKey] => [autoIncrement] => [comment] => 来源 [_e:CComponent:private] => [_m:CComponent:private] => ) [source_link] => CMysqlColumnSchema Object ( [name] => source_link [rawName] => `source_link` [allowNull] => 1 [dbType] => varchar(255) [type] => string [defaultValue] => [size] => 255 [precision] => 255 [scale] => [isPrimaryKey] => [isForeignKey] => [autoIncrement] => [comment] => 来源链接 [_e:CComponent:private] => [_m:CComponent:private] => ) [author] => CMysqlColumnSchema Object ( [name] => author [rawName] => `author` [allowNull] => 1 [dbType] => varchar(255) [type] => string [defaultValue] => [size] => 255 [precision] => 255 [scale] => [isPrimaryKey] => [isForeignKey] => [autoIncrement] => [comment] => 作者 [_e:CComponent:private] => [_m:CComponent:private] => ) [editor] => CMysqlColumnSchema Object ( [name] => editor [rawName] => `editor` [allowNull] => 1 [dbType] => varchar(255) [type] => string [defaultValue] => [size] => 255 [precision] => 255 [scale] => [isPrimaryKey] => [isForeignKey] => [autoIncrement] => [comment] => 编辑 [_e:CComponent:private] => [_m:CComponent:private] => ) [admin_id] => CMysqlColumnSchema Object ( [name] => admin_id [rawName] => `admin_id` [allowNull] => [dbType] => int(10) unsigned [type] => string [defaultValue] => 0 [size] => 10 [precision] => 10 [scale] => [isPrimaryKey] => [isForeignKey] => [autoIncrement] => [comment] => 管理员id [_e:CComponent:private] => [_m:CComponent:private] => ) [content] => CMysqlColumnSchema Object ( [name] => content [rawName] => `content` [allowNull] => 1 [dbType] => text [type] => string [defaultValue] => [size] => [precision] => [scale] => [isPrimaryKey] => [isForeignKey] => [autoIncrement] => [comment] => 内容 [_e:CComponent:private] => [_m:CComponent:private] => ) [created_at] => CMysqlColumnSchema Object ( [name] => created_at [rawName] => `created_at` [allowNull] => [dbType] => datetime [type] => string [defaultValue] => 0000-00-00 00:00:00 [size] => [precision] => [scale] => [isPrimaryKey] => [isForeignKey] => [autoIncrement] => [comment] => 创建日期 [_e:CComponent:private] => [_m:CComponent:private] => ) [updated_at] => CMysqlColumnSchema Object ( [name] => updated_at [rawName] => `updated_at` [allowNull] => [dbType] => datetime [type] => string [defaultValue] => 0000-00-00 00:00:00 [size] => [precision] => [scale] => [isPrimaryKey] => [isForeignKey] => [autoIncrement] => [comment] => 更新日期 [_e:CComponent:private] => [_m:CComponent:private] => ) [published_at] => CMysqlColumnSchema Object ( [name] => published_at [rawName] => `published_at` [allowNull] => [dbType] => datetime [type] => string [defaultValue] => 0000-00-00 00:00:00 [size] => [precision] => [scale] => [isPrimaryKey] => [isForeignKey] => [autoIncrement] => [comment] => 发布日期 [_e:CComponent:private] => [_m:CComponent:private] => ) [status] => CMysqlColumnSchema Object ( [name] => status [rawName] => `status` [allowNull] => [dbType] => tinyint(1) unsigned [type] => integer [defaultValue] => 0 [size] => 1 [precision] => 1 [scale] => [isPrimaryKey] => [isForeignKey] => [autoIncrement] => [comment] => 状态 [_e:CComponent:private] => [_m:CComponent:private] => ) [sticky] => CMysqlColumnSchema Object ( [name] => sticky [rawName] => `sticky` [allowNull] => [dbType] => tinyint(1) unsigned [type] => integer [defaultValue] => 0 [size] => 1 [precision] => 1 [scale] => [isPrimaryKey] => [isForeignKey] => [autoIncrement] => [comment] => 推荐 [_e:CComponent:private] => [_m:CComponent:private] => ) [display_order] => CMysqlColumnSchema Object ( [name] => display_order [rawName] => `display_order` [allowNull] => [dbType] => smallint(6) unsigned [type] => integer [defaultValue] => 0 [size] => 6 [precision] => 6 [scale] => [isPrimaryKey] => [isForeignKey] => [autoIncrement] => [comment] => 排序 [_e:CComponent:private] => [_m:CComponent:private] => ) [article_type] => CMysqlColumnSchema Object ( [name] => article_type [rawName] => `article_type` [allowNull] => 1 [dbType] => varchar(255) [type] => string [defaultValue] => [size] => 255 [precision] => 255 [scale] => [isPrimaryKey] => [isForeignKey] => [autoIncrement] => [comment] => 文章类型 [_e:CComponent:private] => [_m:CComponent:private] => ) [language] => CMysqlColumnSchema Object ( [name] => language [rawName] => `language` [allowNull] => 1 [dbType] => varchar(20) [type] => string [defaultValue] => [size] => 20 [precision] => 20 [scale] => [isPrimaryKey] => [isForeignKey] => [autoIncrement] => [comment] => [_e:CComponent:private] => [_m:CComponent:private] => ) [subtitle] => CMysqlColumnSchema Object ( [name] => subtitle [rawName] => `subtitle` [allowNull] => 1 [dbType] => varchar(255) [type] => string [defaultValue] => [size] => 255 [precision] => 255 [scale] => [isPrimaryKey] => [isForeignKey] => [autoIncrement] => [comment] => [_e:CComponent:private] => [_m:CComponent:private] => ) [file] => CMysqlColumnSchema Object ( [name] => file [rawName] => `file` [allowNull] => 1 [dbType] => varchar(255) [type] => string [defaultValue] => [size] => 255 [precision] => 255 [scale] => [isPrimaryKey] => [isForeignKey] => [autoIncrement] => [comment] => [_e:CComponent:private] => [_m:CComponent:private] => ) [is_oauth] => CMysqlColumnSchema Object ( [name] => is_oauth [rawName] => `is_oauth` [allowNull] => [dbType] => tinyint(1) unsigned [type] => integer [defaultValue] => 0 [size] => 1 [precision] => 1 [scale] => [isPrimaryKey] => [isForeignKey] => [autoIncrement] => [comment] => 是否需要认证(0为不限制) [_e:CComponent:private] => [_m:CComponent:private] => ) [is_highlight] => CMysqlColumnSchema Object ( [name] => is_highlight [rawName] => `is_highlight` [allowNull] => [dbType] => tinyint(1) unsigned [type] => integer [defaultValue] => 0 [size] => 1 [precision] => 1 [scale] => [isPrimaryKey] => [isForeignKey] => [autoIncrement] => [comment] => 是否高亮 [_e:CComponent:private] => [_m:CComponent:private] => ) ) [_e:CComponent:private] => [_m:CComponent:private] => ) [columns] => Array ( [id] => CMysqlColumnSchema Object ( [name] => id [rawName] => `id` [allowNull] => [dbType] => int(10) unsigned [type] => string [defaultValue] => [size] => 10 [precision] => 10 [scale] => [isPrimaryKey] => 1 [isForeignKey] => [autoIncrement] => 1 [comment] => [_e:CComponent:private] => [_m:CComponent:private] => ) [sort_id] => CMysqlColumnSchema Object ( [name] => sort_id [rawName] => `sort_id` [allowNull] => [dbType] => smallint(6) unsigned [type] => integer [defaultValue] => 0 [size] => 6 [precision] => 6 [scale] => [isPrimaryKey] => [isForeignKey] => [autoIncrement] => [comment] => 分类id [_e:CComponent:private] => [_m:CComponent:private] => ) [title] => CMysqlColumnSchema Object ( [name] => title [rawName] => `title` [allowNull] => 1 [dbType] => varchar(255) [type] => string [defaultValue] => [size] => 255 [precision] => 255 [scale] => [isPrimaryKey] => [isForeignKey] => [autoIncrement] => [comment] => 标题 [_e:CComponent:private] => [_m:CComponent:private] => ) [title_pic] => CMysqlColumnSchema Object ( [name] => title_pic [rawName] => `title_pic` [allowNull] => 1 [dbType] => varchar(255) [type] => string [defaultValue] => [size] => 255 [precision] => 255 [scale] => [isPrimaryKey] => [isForeignKey] => [autoIncrement] => [comment] => 标题图片 [_e:CComponent:private] => [_m:CComponent:private] => ) [intro] => CMysqlColumnSchema Object ( [name] => intro [rawName] => `intro` [allowNull] => 1 [dbType] => text [type] => string [defaultValue] => [size] => [precision] => [scale] => [isPrimaryKey] => [isForeignKey] => [autoIncrement] => [comment] => 简介 [_e:CComponent:private] => [_m:CComponent:private] => ) [source] => CMysqlColumnSchema Object ( [name] => source [rawName] => `source` [allowNull] => 1 [dbType] => varchar(255) [type] => string [defaultValue] => [size] => 255 [precision] => 255 [scale] => [isPrimaryKey] => [isForeignKey] => [autoIncrement] => [comment] => 来源 [_e:CComponent:private] => [_m:CComponent:private] => ) [source_link] => CMysqlColumnSchema Object ( [name] => source_link [rawName] => `source_link` [allowNull] => 1 [dbType] => varchar(255) [type] => string [defaultValue] => [size] => 255 [precision] => 255 [scale] => [isPrimaryKey] => [isForeignKey] => [autoIncrement] => [comment] => 来源链接 [_e:CComponent:private] => [_m:CComponent:private] => ) [author] => CMysqlColumnSchema Object ( [name] => author [rawName] => `author` [allowNull] => 1 [dbType] => varchar(255) [type] => string [defaultValue] => [size] => 255 [precision] => 255 [scale] => [isPrimaryKey] => [isForeignKey] => [autoIncrement] => [comment] => 作者 [_e:CComponent:private] => [_m:CComponent:private] => ) [editor] => CMysqlColumnSchema Object ( [name] => editor [rawName] => `editor` [allowNull] => 1 [dbType] => varchar(255) [type] => string [defaultValue] => [size] => 255 [precision] => 255 [scale] => [isPrimaryKey] => [isForeignKey] => [autoIncrement] => [comment] => 编辑 [_e:CComponent:private] => [_m:CComponent:private] => ) [admin_id] => CMysqlColumnSchema Object ( [name] => admin_id [rawName] => `admin_id` [allowNull] => [dbType] => int(10) unsigned [type] => string [defaultValue] => 0 [size] => 10 [precision] => 10 [scale] => [isPrimaryKey] => [isForeignKey] => [autoIncrement] => [comment] => 管理员id [_e:CComponent:private] => [_m:CComponent:private] => ) [content] => CMysqlColumnSchema Object ( [name] => content [rawName] => `content` [allowNull] => 1 [dbType] => text [type] => string [defaultValue] => [size] => [precision] => [scale] => [isPrimaryKey] => [isForeignKey] => [autoIncrement] => [comment] => 内容 [_e:CComponent:private] => [_m:CComponent:private] => ) [created_at] => CMysqlColumnSchema Object ( [name] => created_at [rawName] => `created_at` [allowNull] => [dbType] => datetime [type] => string [defaultValue] => 0000-00-00 00:00:00 [size] => [precision] => [scale] => [isPrimaryKey] => [isForeignKey] => [autoIncrement] => [comment] => 创建日期 [_e:CComponent:private] => [_m:CComponent:private] => ) [updated_at] => CMysqlColumnSchema Object ( [name] => updated_at [rawName] => `updated_at` [allowNull] => [dbType] => datetime [type] => string [defaultValue] => 0000-00-00 00:00:00 [size] => [precision] => [scale] => [isPrimaryKey] => [isForeignKey] => [autoIncrement] => [comment] => 更新日期 [_e:CComponent:private] => [_m:CComponent:private] => ) [published_at] => CMysqlColumnSchema Object ( [name] => published_at [rawName] => `published_at` [allowNull] => [dbType] => datetime [type] => string [defaultValue] => 0000-00-00 00:00:00 [size] => [precision] => [scale] => [isPrimaryKey] => [isForeignKey] => [autoIncrement] => [comment] => 发布日期 [_e:CComponent:private] => [_m:CComponent:private] => ) [status] => CMysqlColumnSchema Object ( [name] => status [rawName] => `status` [allowNull] => [dbType] => tinyint(1) unsigned [type] => integer [defaultValue] => 0 [size] => 1 [precision] => 1 [scale] => [isPrimaryKey] => [isForeignKey] => [autoIncrement] => [comment] => 状态 [_e:CComponent:private] => [_m:CComponent:private] => ) [sticky] => CMysqlColumnSchema Object ( [name] => sticky [rawName] => `sticky` [allowNull] => [dbType] => tinyint(1) unsigned [type] => integer [defaultValue] => 0 [size] => 1 [precision] => 1 [scale] => [isPrimaryKey] => [isForeignKey] => [autoIncrement] => [comment] => 推荐 [_e:CComponent:private] => [_m:CComponent:private] => ) [display_order] => CMysqlColumnSchema Object ( [name] => display_order [rawName] => `display_order` [allowNull] => [dbType] => smallint(6) unsigned [type] => integer [defaultValue] => 0 [size] => 6 [precision] => 6 [scale] => [isPrimaryKey] => [isForeignKey] => [autoIncrement] => [comment] => 排序 [_e:CComponent:private] => [_m:CComponent:private] => ) [article_type] => CMysqlColumnSchema Object ( [name] => article_type [rawName] => `article_type` [allowNull] => 1 [dbType] => varchar(255) [type] => string [defaultValue] => [size] => 255 [precision] => 255 [scale] => [isPrimaryKey] => [isForeignKey] => [autoIncrement] => [comment] => 文章类型 [_e:CComponent:private] => [_m:CComponent:private] => ) [language] => CMysqlColumnSchema Object ( [name] => language [rawName] => `language` [allowNull] => 1 [dbType] => varchar(20) [type] => string [defaultValue] => [size] => 20 [precision] => 20 [scale] => [isPrimaryKey] => [isForeignKey] => [autoIncrement] => [comment] => [_e:CComponent:private] => [_m:CComponent:private] => ) [subtitle] => CMysqlColumnSchema Object ( [name] => subtitle [rawName] => `subtitle` [allowNull] => 1 [dbType] => varchar(255) [type] => string [defaultValue] => [size] => 255 [precision] => 255 [scale] => [isPrimaryKey] => [isForeignKey] => [autoIncrement] => [comment] => [_e:CComponent:private] => [_m:CComponent:private] => ) [file] => CMysqlColumnSchema Object ( [name] => file [rawName] => `file` [allowNull] => 1 [dbType] => varchar(255) [type] => string [defaultValue] => [size] => 255 [precision] => 255 [scale] => [isPrimaryKey] => [isForeignKey] => [autoIncrement] => [comment] => [_e:CComponent:private] => [_m:CComponent:private] => ) [is_oauth] => CMysqlColumnSchema Object ( [name] => is_oauth [rawName] => `is_oauth` [allowNull] => [dbType] => tinyint(1) unsigned [type] => integer [defaultValue] => 0 [size] => 1 [precision] => 1 [scale] => [isPrimaryKey] => [isForeignKey] => [autoIncrement] => [comment] => 是否需要认证(0为不限制) [_e:CComponent:private] => [_m:CComponent:private] => ) [is_highlight] => CMysqlColumnSchema Object ( [name] => is_highlight [rawName] => `is_highlight` [allowNull] => [dbType] => tinyint(1) unsigned [type] => integer [defaultValue] => 0 [size] => 1 [precision] => 1 [scale] => [isPrimaryKey] => [isForeignKey] => [autoIncrement] => [comment] => 是否高亮 [_e:CComponent:private] => [_m:CComponent:private] => ) ) [relations] => Array ( [Admin] => CBelongsToRelation Object ( [joinType] => LEFT OUTER JOIN [on] => [alias] => [with] => Array ( ) [together] => [scopes] => [name] => Admin [className] => Admin [foreignKey] => Array ( [admin_id] => id ) [select] => * [condition] => [params] => Array ( ) [group] => [join] => [having] => [order] => [_e:CComponent:private] => [_m:CComponent:private] => ) [Sort] => CBelongsToRelation Object ( [joinType] => LEFT OUTER JOIN [on] => [alias] => [with] => Array ( ) [together] => [scopes] => [name] => Sort [className] => Sort [foreignKey] => Array ( [sort_id] => id ) [select] => * [condition] => [params] => Array ( ) [group] => [join] => [having] => [order] => [_e:CComponent:private] => [_m:CComponent:private] => ) ) [attributeDefaults] => Array ( [sort_id] => 0 [admin_id] => 0 [created_at] => 0000-00-00 00:00:00 [updated_at] => 0000-00-00 00:00:00 [published_at] => 0000-00-00 00:00:00 [status] => 0 [sticky] => 0 [display_order] => 0 [is_oauth] => 0 [is_highlight] => 0 ) [_model:CActiveRecordMetaData:private] => Article Object ( [_status:protected] => [_sticky:protected] => [_md:CActiveRecord:private] => CActiveRecordMetaData Object *RECURSION* [_new:CActiveRecord:private] => [_attributes:CActiveRecord:private] => Array ( ) [_related:CActiveRecord:private] => Array ( ) [_c:CActiveRecord:private] => [_pk:CActiveRecord:private] => [_alias:CActiveRecord:private] => t [_errors:CModel:private] => Array ( ) [_validators:CModel:private] => [_scenario:CModel:private] => [_e:CComponent:private] => [_m:CComponent:private] => ) ) [_new:CActiveRecord:private] => [_attributes:CActiveRecord:private] => Array ( [id] => 5626 [title] => 基于激光光源的微区角分辨光电子能谱仪项目采购需求公示 [sort_id] => 56 [published_at] => 2020-10-13 09:30:44 ) [_related:CActiveRecord:private] => Array ( ) [_c:CActiveRecord:private] => [_pk:CActiveRecord:private] => 5626 [_alias:CActiveRecord:private] => t [_errors:CModel:private] => Array ( ) [_validators:CModel:private] => [_scenario:CModel:private] => update [_e:CComponent:private] => [_m:CComponent:private] => )
超高真空低温扫描隧道显微镜采购项目采购需求公示
2020-09-25(一)项目基本信息
项目名称 |
超高真空低温扫描隧道显微镜采购项目 |
采购预算(元) |
7,600,000 |
是否接受进口设备 |
是 |
(二)货物清单
序号 |
设备名称 |
数量 |
单位 |
1 |
低温扫描隧道显微镜 |
1 |
套 |
(三)商务需求
序号 |
商务需求 |
1 |
交货期的要求:签订合同后330天内 |
2 |
质保期: 1年 |
3 |
付款方式: 合同生效并收到相应发票后支付合同总额的30%作为进度款;设备到达指定安装现场且安装、调试验收合格并提供全额发票后支付合同总额的65%;余款5%待质保期满12个月后且无质量问题并经学校确认后支付。 |
(四)技术需求
序号 |
设备名称 |
技术参数或功能要求 |
1 |
低温扫描隧道显微镜 |
1. 扫描头 |
★1.1扫描头采用三维独立的粗定位系统,其中水平粗定位为样品移动,垂直粗定位为针尖移动 |
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★1.2扫描头粗调移动范围:水平不小于4mm*4mm;垂直不小于 10mm |
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★1.3扫描头扫描范围XYZ不小于:10um * 10um * 1.5um @ T=300K,1.8um *1.8um * 0.2um @ T=10K |
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▲1.4.扫描头采用样品面朝下设计,有利于光学和原位蒸镀实验 |
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1.5. 扫描头样品台兼容标准flag style样品托 |
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1.6. 针尖和样品可独立更换,且有针尖更换特殊保护装置 |
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1.7. 在更换针尖需样品在扫描台上的前提下,可兼容样品高度最大为3mm;如更换针尖时无需保留样品,可兼容样品高度最大为6mm |
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1.8. 针尖或样品可接地,偏置电压电极为BNC接头 |
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1.9. 扫描头含内置电阻加热装备,提供含反馈功能的电源,实现样品区域温度<10K-150K连续变化(针尖与样品温度一致)的功能 |
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▲1.10. 扫描头样品台可提供不少于10个接触电极,用于样品电学测量和样品变温加热 |
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1.11. 扫描头的稳定性:关闭反馈,峰峰值(z方向上)小于2pm |
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1.12. 扫描头的性能指标:STM 模式:低于10K,Au(111)或 Si(111) 7x7 表面原子像 |
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1.13. 震动隔离: STM扫描头采用悬挂弹簧并有涡流阻尼的震动隔离系统,以实现对STM扫描头的最优化机械隔离 |
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2.低温制冷系统 |
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2.1制冷系统与STM扫描系统之间必须进行双腔体式有效隔离,且制冷系统开启的情况下,声学噪音小于50dB |
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2.2样品最低温度:< 10 K |
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2.3无液氦消耗,工作时扫描头温度达到或低于10 K |
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2.4双层热辐射隔离屏,隔离热辐射 |
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2.5样品台上带有完整的配套控温系统 |
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2.6冷头可在保持扫描头10K温度下长时间不间断稳定工作至少20000小时,压缩机至少可持续工作30000小时 |
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3. 超高真空系统 |
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▲3.1超高真空系统由STM腔、H-cleaning腔、沉积腔、样品加热腔、快速进样腔组成 |
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3.2 STM腔配置满足以下要求: |
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3.2.1配置离子泵(不小于75 l/s),钛升华泵,离子规和皮拉尼规 |
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▲3.2.2可存放不少于15个样品和10个针尖 |
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3.2.3包含必要的法兰口,可用于光学通路、蒸发源或进气 |
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3.3. H-cleaning 腔满足以下要求: |
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3.3.1. 配置离子泵(抽速不小于150 l/s),钛升华泵、涡轮分子泵(抽速度不小于260 l/s)和前级无油机械泵 |
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3.3.2. 配置加热器,可辐射或直接通电流加热样品,辐射加热可达1100℃ |
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3.3.3. 配置氢原子束流源,包含全套电源和控温系统 |
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3.4. 快速进样腔满足以下要求: |
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3.4.1. 配置涡轮分子泵(抽速不小于67 l/s) |
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3.4.2. 配置宽量程规(1e-8 mbar至atm) |
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3.5. 样品加热腔满足以下要求: |
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3.5.1. 配置离子泵(抽速不小于75 l/s)和离子规 |
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3.5.2. 配置加热器,可辐射或直接通电流加热样品,辐射加热可达1100℃ |
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3.6. 沉积腔满足以下要求: |
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3.6.1. 沉积腔为内径不小于250 mm的圆柱形腔体 |
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3.6.2. 沉积腔包含不小于4个蒸发源法兰口,和其他必要的法兰接口 |
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3.6.3. 沉积腔配置离子泵(抽速不小于300 l/s)、钛升华泵、涡轮分子泵(抽速不小于260 l/s)及前级无油机械泵 |
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3.6.4. 沉积腔配置四维操纵台, |
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3.6.4.1. X/Y移动范围不小于±12.5 mm,z方向移动距离满足实验需求,可±180°转动 |
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▲3.6.4.2. 包含辐射高温加热模块,可辐射加热样品至1400℃ |
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3.6.4.3.可直接通电流加热样品 |
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3.7包含程序控制的全套烘烤系统 |
(五)公示期限
2020年9月25日至2020年10月9日
对公示内容有异议的,请在公示期内以书面形式将意见反馈至采购人。
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