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Article Object ( [_status:protected] => Array ( [0] => 已发布 [1] => 草稿 [2] => 禁用 [3] => 已审核 [4] => 已回收 ) [_sticky:protected] => Array ( [0] => 否 [1] => 置顶 ) [_md:CActiveRecord:private] => CActiveRecordMetaData Object ( [tableSchema] => CMysqlTableSchema Object ( [schemaName] => [name] => article [rawName] => `article` [primaryKey] => id [sequenceName] => [foreignKeys] => Array ( ) [columns] => Array ( [id] => CMysqlColumnSchema Object ( [name] => id [rawName] => `id` [allowNull] => [dbType] => int(10) unsigned [type] => string [defaultValue] => [size] => 10 [precision] => 10 [scale] => [isPrimaryKey] => 1 [isForeignKey] => [autoIncrement] => 1 [comment] => [_e:CComponent:private] => [_m:CComponent:private] => ) [sort_id] => CMysqlColumnSchema Object ( [name] => sort_id [rawName] => `sort_id` [allowNull] => [dbType] => smallint(6) unsigned [type] => integer [defaultValue] => 0 [size] => 6 [precision] => 6 [scale] => [isPrimaryKey] => [isForeignKey] => [autoIncrement] => [comment] => 分类id [_e:CComponent:private] => [_m:CComponent:private] => ) [title] => CMysqlColumnSchema Object ( [name] => title [rawName] => `title` [allowNull] => 1 [dbType] => varchar(255) [type] => string [defaultValue] => [size] => 255 [precision] => 255 [scale] => [isPrimaryKey] => [isForeignKey] => [autoIncrement] => [comment] => 标题 [_e:CComponent:private] => [_m:CComponent:private] => ) [title_pic] => CMysqlColumnSchema Object ( [name] => title_pic [rawName] => `title_pic` [allowNull] => 1 [dbType] => varchar(255) [type] => string [defaultValue] => [size] => 255 [precision] => 255 [scale] => [isPrimaryKey] => [isForeignKey] => [autoIncrement] => [comment] => 标题图片 [_e:CComponent:private] => [_m:CComponent:private] => ) [intro] => CMysqlColumnSchema Object ( [name] => intro [rawName] => `intro` [allowNull] => 1 [dbType] => text [type] => string [defaultValue] => [size] => [precision] => [scale] => [isPrimaryKey] => [isForeignKey] => [autoIncrement] => [comment] => 简介 [_e:CComponent:private] => [_m:CComponent:private] => ) [source] => CMysqlColumnSchema Object ( [name] => source [rawName] => `source` [allowNull] => 1 [dbType] => varchar(255) [type] => string [defaultValue] => [size] => 255 [precision] => 255 [scale] => [isPrimaryKey] => [isForeignKey] => [autoIncrement] => [comment] => 来源 [_e:CComponent:private] => [_m:CComponent:private] => ) [source_link] => CMysqlColumnSchema Object ( [name] => source_link [rawName] => `source_link` [allowNull] => 1 [dbType] => varchar(255) [type] => string [defaultValue] => [size] => 255 [precision] => 255 [scale] => [isPrimaryKey] => [isForeignKey] => [autoIncrement] => [comment] => 来源链接 [_e:CComponent:private] => [_m:CComponent:private] => ) [author] => CMysqlColumnSchema Object ( [name] => author [rawName] => `author` [allowNull] => 1 [dbType] => varchar(255) [type] => string [defaultValue] => [size] => 255 [precision] => 255 [scale] => [isPrimaryKey] => [isForeignKey] => [autoIncrement] => [comment] => 作者 [_e:CComponent:private] => [_m:CComponent:private] => ) [editor] => CMysqlColumnSchema Object ( [name] => editor [rawName] => `editor` [allowNull] => 1 [dbType] => varchar(255) [type] => string [defaultValue] => [size] => 255 [precision] => 255 [scale] => [isPrimaryKey] => [isForeignKey] => [autoIncrement] => [comment] => 编辑 [_e:CComponent:private] => [_m:CComponent:private] => ) [admin_id] => CMysqlColumnSchema Object ( [name] => admin_id [rawName] => `admin_id` [allowNull] => [dbType] => int(10) unsigned [type] => string [defaultValue] => 0 [size] => 10 [precision] => 10 [scale] => [isPrimaryKey] => [isForeignKey] => [autoIncrement] => [comment] => 管理员id [_e:CComponent:private] => [_m:CComponent:private] => ) [content] => CMysqlColumnSchema Object ( [name] => content [rawName] => `content` [allowNull] => 1 [dbType] => text [type] => string [defaultValue] => [size] => [precision] => [scale] => [isPrimaryKey] => [isForeignKey] => [autoIncrement] => [comment] => 内容 [_e:CComponent:private] => [_m:CComponent:private] => ) [created_at] => CMysqlColumnSchema Object ( [name] => created_at [rawName] => `created_at` [allowNull] => [dbType] => datetime [type] => string [defaultValue] => 0000-00-00 00:00:00 [size] => [precision] => [scale] => [isPrimaryKey] => [isForeignKey] => [autoIncrement] => [comment] => 创建日期 [_e:CComponent:private] => [_m:CComponent:private] => ) [updated_at] => CMysqlColumnSchema Object ( [name] => updated_at [rawName] => `updated_at` [allowNull] => [dbType] => datetime [type] => string [defaultValue] => 0000-00-00 00:00:00 [size] => [precision] => [scale] => [isPrimaryKey] => [isForeignKey] => [autoIncrement] => [comment] => 更新日期 [_e:CComponent:private] => [_m:CComponent:private] => ) [published_at] => CMysqlColumnSchema Object ( [name] => published_at [rawName] => `published_at` [allowNull] => [dbType] => datetime [type] => string [defaultValue] => 0000-00-00 00:00:00 [size] => [precision] => [scale] => [isPrimaryKey] => [isForeignKey] => [autoIncrement] => [comment] => 发布日期 [_e:CComponent:private] => [_m:CComponent:private] => ) [status] => CMysqlColumnSchema Object ( [name] => status [rawName] => `status` [allowNull] => [dbType] => tinyint(1) unsigned [type] => integer [defaultValue] => 0 [size] => 1 [precision] => 1 [scale] => [isPrimaryKey] => [isForeignKey] => [autoIncrement] => [comment] => 状态 [_e:CComponent:private] => [_m:CComponent:private] => ) [sticky] => CMysqlColumnSchema Object ( [name] => sticky [rawName] => `sticky` [allowNull] => [dbType] => tinyint(1) unsigned [type] => integer [defaultValue] => 0 [size] => 1 [precision] => 1 [scale] => [isPrimaryKey] => [isForeignKey] => [autoIncrement] => [comment] => 推荐 [_e:CComponent:private] => [_m:CComponent:private] => ) [display_order] => CMysqlColumnSchema Object ( [name] => display_order [rawName] => `display_order` [allowNull] => [dbType] => smallint(6) unsigned [type] => integer [defaultValue] => 0 [size] => 6 [precision] => 6 [scale] => [isPrimaryKey] => [isForeignKey] => [autoIncrement] => [comment] => 排序 [_e:CComponent:private] => [_m:CComponent:private] => ) [article_type] => CMysqlColumnSchema Object ( [name] => article_type [rawName] => `article_type` [allowNull] => 1 [dbType] => varchar(255) [type] => string [defaultValue] => [size] => 255 [precision] => 255 [scale] => [isPrimaryKey] => [isForeignKey] => [autoIncrement] => [comment] => 文章类型 [_e:CComponent:private] => [_m:CComponent:private] => ) [language] => CMysqlColumnSchema Object ( [name] => language [rawName] => `language` [allowNull] => 1 [dbType] => varchar(20) [type] => string [defaultValue] => [size] => 20 [precision] => 20 [scale] => [isPrimaryKey] => [isForeignKey] => [autoIncrement] => [comment] => [_e:CComponent:private] => [_m:CComponent:private] => ) [subtitle] => CMysqlColumnSchema Object ( [name] => subtitle [rawName] => `subtitle` [allowNull] => 1 [dbType] => varchar(255) [type] => string [defaultValue] => [size] => 255 [precision] => 255 [scale] => [isPrimaryKey] => [isForeignKey] => [autoIncrement] => [comment] => [_e:CComponent:private] => [_m:CComponent:private] => ) [file] => CMysqlColumnSchema Object ( [name] => file [rawName] => `file` [allowNull] => 1 [dbType] => varchar(255) [type] => string [defaultValue] => [size] => 255 [precision] => 255 [scale] => [isPrimaryKey] => [isForeignKey] => [autoIncrement] => [comment] => [_e:CComponent:private] => [_m:CComponent:private] => ) [is_oauth] => CMysqlColumnSchema Object ( [name] => is_oauth [rawName] => `is_oauth` [allowNull] => [dbType] => tinyint(1) unsigned [type] => integer [defaultValue] => 0 [size] => 1 [precision] => 1 [scale] => [isPrimaryKey] => [isForeignKey] => [autoIncrement] => [comment] => 是否需要认证(0为不限制) [_e:CComponent:private] => [_m:CComponent:private] => ) [is_highlight] => CMysqlColumnSchema Object ( [name] => is_highlight [rawName] => `is_highlight` [allowNull] => [dbType] => tinyint(1) unsigned [type] => integer [defaultValue] => 0 [size] => 1 [precision] => 1 [scale] => [isPrimaryKey] => [isForeignKey] => [autoIncrement] => [comment] => 是否高亮 [_e:CComponent:private] => [_m:CComponent:private] => ) ) [_e:CComponent:private] => [_m:CComponent:private] => ) [columns] => Array ( [id] => CMysqlColumnSchema Object ( [name] => id [rawName] => `id` [allowNull] => [dbType] => int(10) unsigned [type] => string [defaultValue] => [size] => 10 [precision] => 10 [scale] => [isPrimaryKey] => 1 [isForeignKey] => [autoIncrement] => 1 [comment] => [_e:CComponent:private] => [_m:CComponent:private] => ) [sort_id] => CMysqlColumnSchema Object ( [name] => sort_id [rawName] => `sort_id` [allowNull] => [dbType] => smallint(6) unsigned [type] => integer [defaultValue] => 0 [size] => 6 [precision] => 6 [scale] => [isPrimaryKey] => [isForeignKey] => [autoIncrement] => [comment] => 分类id [_e:CComponent:private] => [_m:CComponent:private] => ) [title] => CMysqlColumnSchema Object ( [name] => title [rawName] => `title` [allowNull] => 1 [dbType] => varchar(255) [type] => string [defaultValue] => [size] => 255 [precision] => 255 [scale] => [isPrimaryKey] => [isForeignKey] => [autoIncrement] => [comment] => 标题 [_e:CComponent:private] => [_m:CComponent:private] => ) [title_pic] => CMysqlColumnSchema Object ( [name] => title_pic [rawName] => `title_pic` [allowNull] => 1 [dbType] => varchar(255) [type] => string [defaultValue] => [size] => 255 [precision] => 255 [scale] => [isPrimaryKey] => [isForeignKey] => [autoIncrement] => [comment] => 标题图片 [_e:CComponent:private] => [_m:CComponent:private] => ) [intro] => CMysqlColumnSchema Object ( [name] => intro [rawName] => `intro` [allowNull] => 1 [dbType] => text [type] => string [defaultValue] => [size] => [precision] => [scale] => [isPrimaryKey] => [isForeignKey] => [autoIncrement] => [comment] => 简介 [_e:CComponent:private] => [_m:CComponent:private] => ) [source] => CMysqlColumnSchema Object ( [name] => source [rawName] => `source` [allowNull] => 1 [dbType] => varchar(255) [type] => string [defaultValue] => [size] => 255 [precision] => 255 [scale] => [isPrimaryKey] => [isForeignKey] => [autoIncrement] => [comment] => 来源 [_e:CComponent:private] => [_m:CComponent:private] => ) [source_link] => CMysqlColumnSchema Object ( [name] => source_link [rawName] => `source_link` [allowNull] => 1 [dbType] => varchar(255) [type] => string [defaultValue] => [size] => 255 [precision] => 255 [scale] => [isPrimaryKey] => [isForeignKey] => [autoIncrement] => [comment] => 来源链接 [_e:CComponent:private] => [_m:CComponent:private] => ) [author] => CMysqlColumnSchema Object ( [name] => author [rawName] => `author` [allowNull] => 1 [dbType] => varchar(255) [type] => string [defaultValue] => [size] => 255 [precision] => 255 [scale] => [isPrimaryKey] => [isForeignKey] => [autoIncrement] => [comment] => 作者 [_e:CComponent:private] => [_m:CComponent:private] => ) [editor] => CMysqlColumnSchema Object ( [name] => editor [rawName] => `editor` [allowNull] => 1 [dbType] => varchar(255) [type] => string [defaultValue] => [size] => 255 [precision] => 255 [scale] => [isPrimaryKey] => [isForeignKey] => [autoIncrement] => [comment] => 编辑 [_e:CComponent:private] => [_m:CComponent:private] => ) [admin_id] => CMysqlColumnSchema Object ( [name] => admin_id [rawName] => `admin_id` [allowNull] => [dbType] => int(10) unsigned [type] => string [defaultValue] => 0 [size] => 10 [precision] => 10 [scale] => [isPrimaryKey] => [isForeignKey] => [autoIncrement] => [comment] => 管理员id [_e:CComponent:private] => [_m:CComponent:private] => ) [content] => CMysqlColumnSchema Object ( [name] => content [rawName] => `content` [allowNull] => 1 [dbType] => text [type] => string [defaultValue] => [size] => [precision] => [scale] => [isPrimaryKey] => [isForeignKey] => [autoIncrement] => [comment] => 内容 [_e:CComponent:private] => [_m:CComponent:private] => ) [created_at] => CMysqlColumnSchema Object ( [name] => created_at [rawName] => `created_at` [allowNull] => [dbType] => datetime [type] => string [defaultValue] => 0000-00-00 00:00:00 [size] => [precision] => [scale] => [isPrimaryKey] => [isForeignKey] => [autoIncrement] => [comment] => 创建日期 [_e:CComponent:private] => [_m:CComponent:private] => ) [updated_at] => CMysqlColumnSchema Object ( [name] => updated_at [rawName] => `updated_at` [allowNull] => [dbType] => datetime [type] => string [defaultValue] => 0000-00-00 00:00:00 [size] => [precision] => [scale] => [isPrimaryKey] => [isForeignKey] => [autoIncrement] => [comment] => 更新日期 [_e:CComponent:private] => [_m:CComponent:private] => ) [published_at] => CMysqlColumnSchema Object ( [name] => published_at [rawName] => `published_at` [allowNull] => [dbType] => datetime [type] => string [defaultValue] => 0000-00-00 00:00:00 [size] => [precision] => [scale] => [isPrimaryKey] => [isForeignKey] => [autoIncrement] => [comment] => 发布日期 [_e:CComponent:private] => [_m:CComponent:private] => ) [status] => CMysqlColumnSchema Object ( [name] => status [rawName] => `status` [allowNull] => [dbType] => tinyint(1) unsigned [type] => integer [defaultValue] => 0 [size] => 1 [precision] => 1 [scale] => [isPrimaryKey] => [isForeignKey] => [autoIncrement] => [comment] => 状态 [_e:CComponent:private] => [_m:CComponent:private] => ) [sticky] => CMysqlColumnSchema Object ( [name] => sticky [rawName] => `sticky` [allowNull] => [dbType] => tinyint(1) unsigned [type] => integer [defaultValue] => 0 [size] => 1 [precision] => 1 [scale] => [isPrimaryKey] => [isForeignKey] => [autoIncrement] => [comment] => 推荐 [_e:CComponent:private] => [_m:CComponent:private] => ) [display_order] => CMysqlColumnSchema Object ( [name] => display_order [rawName] => `display_order` [allowNull] => [dbType] => smallint(6) unsigned [type] => integer [defaultValue] => 0 [size] => 6 [precision] => 6 [scale] => [isPrimaryKey] => [isForeignKey] => [autoIncrement] => [comment] => 排序 [_e:CComponent:private] => [_m:CComponent:private] => ) [article_type] => CMysqlColumnSchema Object ( [name] => article_type [rawName] => `article_type` [allowNull] => 1 [dbType] => varchar(255) [type] => string [defaultValue] => [size] => 255 [precision] => 255 [scale] => [isPrimaryKey] => [isForeignKey] => [autoIncrement] => [comment] => 文章类型 [_e:CComponent:private] => [_m:CComponent:private] => ) [language] => CMysqlColumnSchema Object ( [name] => language [rawName] => `language` [allowNull] => 1 [dbType] => varchar(20) [type] => string [defaultValue] => [size] => 20 [precision] => 20 [scale] => [isPrimaryKey] => [isForeignKey] => [autoIncrement] => [comment] => [_e:CComponent:private] => [_m:CComponent:private] => ) [subtitle] => CMysqlColumnSchema Object ( [name] => subtitle [rawName] => `subtitle` [allowNull] => 1 [dbType] => varchar(255) [type] => string [defaultValue] => [size] => 255 [precision] => 255 [scale] => [isPrimaryKey] => [isForeignKey] => [autoIncrement] => [comment] => [_e:CComponent:private] => [_m:CComponent:private] => ) [file] => CMysqlColumnSchema Object ( [name] => file [rawName] => `file` [allowNull] => 1 [dbType] => varchar(255) [type] => string [defaultValue] => [size] => 255 [precision] => 255 [scale] => [isPrimaryKey] => [isForeignKey] => [autoIncrement] => [comment] => [_e:CComponent:private] => [_m:CComponent:private] => ) [is_oauth] => CMysqlColumnSchema Object ( [name] => is_oauth [rawName] => `is_oauth` [allowNull] => [dbType] => tinyint(1) unsigned [type] => integer [defaultValue] => 0 [size] => 1 [precision] => 1 [scale] => [isPrimaryKey] => [isForeignKey] => [autoIncrement] => [comment] => 是否需要认证(0为不限制) [_e:CComponent:private] => [_m:CComponent:private] => ) [is_highlight] => CMysqlColumnSchema Object ( [name] => is_highlight [rawName] => `is_highlight` [allowNull] => [dbType] => tinyint(1) unsigned [type] => integer [defaultValue] => 0 [size] => 1 [precision] => 1 [scale] => [isPrimaryKey] => [isForeignKey] => [autoIncrement] => [comment] => 是否高亮 [_e:CComponent:private] => [_m:CComponent:private] => ) ) [relations] => Array ( [Admin] => CBelongsToRelation Object ( [joinType] => LEFT OUTER JOIN [on] => [alias] => [with] => Array ( ) [together] => [scopes] => [name] => Admin [className] => Admin [foreignKey] => Array ( [admin_id] => id ) [select] => * [condition] => [params] => Array ( ) [group] => [join] => [having] => [order] => [_e:CComponent:private] => [_m:CComponent:private] => ) [Sort] => CBelongsToRelation Object ( [joinType] => LEFT OUTER JOIN [on] => [alias] => [with] => Array ( ) [together] => [scopes] => [name] => Sort [className] => Sort [foreignKey] => Array ( [sort_id] => id ) [select] => * [condition] => [params] => Array ( ) [group] => [join] => [having] => [order] => [_e:CComponent:private] => [_m:CComponent:private] => ) ) [attributeDefaults] => Array ( [sort_id] => 0 [admin_id] => 0 [created_at] => 0000-00-00 00:00:00 [updated_at] => 0000-00-00 00:00:00 [published_at] => 0000-00-00 00:00:00 [status] => 0 [sticky] => 0 [display_order] => 0 [is_oauth] => 0 [is_highlight] => 0 ) [_model:CActiveRecordMetaData:private] => Article Object ( [_status:protected] => [_sticky:protected] => [_md:CActiveRecord:private] => CActiveRecordMetaData Object *RECURSION* [_new:CActiveRecord:private] => [_attributes:CActiveRecord:private] => Array ( ) [_related:CActiveRecord:private] => Array ( ) [_c:CActiveRecord:private] => [_pk:CActiveRecord:private] => [_alias:CActiveRecord:private] => t [_errors:CModel:private] => Array ( ) [_validators:CModel:private] => [_scenario:CModel:private] => [_e:CComponent:private] => [_m:CComponent:private] => ) ) [_new:CActiveRecord:private] => [_attributes:CActiveRecord:private] => Array ( [id] => 5577 [title] => 超高真空变温扫描隧道显微镜采购项目采购需求公示 [sort_id] => 56 [published_at] => 2020-09-25 12:33:34 ) [_related:CActiveRecord:private] => Array ( ) [_c:CActiveRecord:private] => [_pk:CActiveRecord:private] => 5577 [_alias:CActiveRecord:private] => t [_errors:CModel:private] => Array ( ) [_validators:CModel:private] => [_scenario:CModel:private] => update [_e:CComponent:private] => [_m:CComponent:private] => )
材料基因芯片制备工艺模块等设备采购项目采购需求公示
2020-09-14(一)项目基本信息
项目名称 |
材料基因芯片制备工艺模块等设备采购 |
采购预算(元) |
630万元 |
是否接受进口设备 |
否 |
(二)货物清单
序号 |
设备名称 |
数量 |
单位 |
1 |
材料基因芯片制备工艺模块 |
1 |
套 |
2 |
连续掩膜模块 |
1 |
套 |
3 |
分立掩膜模块 |
1 |
套 |
4 |
多元材料电子束蒸发源 |
1 |
套 |
5 |
材料基因芯片转移过渡腔 |
1 |
套 |
6 |
多样品超高真空更换模块 |
1 |
套 |
7 |
多靶材更换模块 |
1 |
套 |
(三)商务需求
序号 |
商务需求 |
1 |
交货期的要求:签订合同后120天内。 |
2 |
质保期:1年 |
3 |
付款方式:合同生效并收到相应发票后支付合同总额的30%作为进度款;设备到达指定安装现场且安装、调试验收合格并提供全额发票后支付合同总额的65%;余款5%待质保期满且无质量问题并经学校确认后支付 |
(四)技术需求
序号 |
设备名称 |
技术参数或功能要求 |
1 |
材料基因芯片制备工艺模块 |
|
1.2基片直径 ≥ 4 inch,膜厚均匀性优于±3% |
||
1.3电控气动真空阀,全量程真空规 |
||
1.4 材料基因芯片制备过程操作模式:手动、自动、和维护 |
||
1.5▲可以制备5元及以上组合材料芯片,三元及三元以上连续镀膜材料基因芯片,三元及三元以上阶梯镀膜材料基因芯片 |
||
1.6抽真空系统:低温泵和离子泵,各腔体之间使用高真空插板阀连接;机械真空泵和腔体使用电控气动真空阀连接 |
||
1.7系统文件:一个包含系统文件U盘 (操作手册,机械图,电路图) |
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1.8▲系统电控和自动控制:1 )制备工艺使用PLC+触摸屏实现自动化控制;2)控制模块化;3)提供控制软件;4)带平板显示器,显示系统运行的状态、数据、和警告;5)记录所有系统自动运行时的数据,工艺数据采集频率 < 1s |
||
1.9电控系统:1) 3相电源的输入和控制;2)真空系统自锁; 3)各真空腔内的机械传动系统的限位; 4)电子束蒸发源系统的保护; 5)真空系统保护; 6)报警 :失水, 失气, 过压,过流 ,温度 |
||
2 |
连续掩膜模块 |
2.1使用314不锈钢制造,元件表面进行抛光,满足10^-8 torr 真空设计要求 |
2.2▲步进精度≤10μm,移动速度:0~2.5 mm/s 可调 |
||
2.3成分分布连续,0-100%成分分布范围可控 |
||
2.4▲分辨率可达0.1% |
||
2.5 ★含1套固定掩膜装置 |
||
3 |
分立掩膜模块 |
3.1▲样品台旋转角度0-360°,样品台旋转精度≤0.0002° |
3.2▲掩模转角定位精度≤0.0002° |
||
3.3▲掩模中心定位精度≤10 μm |
||
3.4单个沉积微区边长≤1mm,组合通量 ≥ 200 |
||
3.5▲掩膜板尺寸可以根据需求在1-4英寸之间变化 |
||
3.6▲系统掩膜板数量可以根据需要增加 |
||
4 |
多元材料电子束蒸发源 |
4.1功率≥6 kW, |
4.2连续蒸发材料种类 ≥ 6 |
||
4.3单层薄膜最小厚度1 nm的连续沉积 |
||
4.4膜厚均匀性优于±3% |
||
4.5▲ UHV电子束蒸发源 |
||
5 |
材料基因芯片转移过渡腔 |
5.1▲真空度优于5E-10 Torr |
5.2▲样品定位精度 ≤ 1μm |
||
5.3材料基因芯片转移自动化 |
||
6 |
多样品超高真空更换模块 |
6.1真空度优于5E-6 Torr |
6.2自动向转移腔取送样品 |
||
6.3 样品溅射清洗 |
||
7 |
多靶材更换模块 |
7.1水含量≤ 1ppm, |
7.2氧含量≤1 ppm |
||
7.3泄漏率< 0.001 vol%/h |
||
7.4 ★机械手更换蒸发材料 |
(五)公示期限
2020年9月14日至2020年9月19日
对公示内容有异议的,请在公示期内以书面形式将意见反馈至采购人。
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