© 2009-2024 All Rights Reserved. 粤ICP备14051456号
地址:深圳市南山区学苑大道1088号南方科技大学创园4栋203室 电话:0755-88018567 邮编:518055
Article Object
(
[_status:protected] => Array
(
[0] => 已发布
[1] => 草稿
[2] => 禁用
[3] => 已审核
[4] => 已回收
)
[_sticky:protected] => Array
(
[0] => 否
[1] => 置顶
)
[_md:CActiveRecord:private] => CActiveRecordMetaData Object
(
[tableSchema] => CMysqlTableSchema Object
(
[schemaName] =>
[name] => article
[rawName] => `article`
[primaryKey] => id
[sequenceName] =>
[foreignKeys] => Array
(
)
[columns] => Array
(
[id] => CMysqlColumnSchema Object
(
[name] => id
[rawName] => `id`
[allowNull] =>
[dbType] => int(10) unsigned
[type] => string
[defaultValue] =>
[size] => 10
[precision] => 10
[scale] =>
[isPrimaryKey] => 1
[isForeignKey] =>
[autoIncrement] => 1
[comment] =>
[_e:CComponent:private] =>
[_m:CComponent:private] =>
)
[sort_id] => CMysqlColumnSchema Object
(
[name] => sort_id
[rawName] => `sort_id`
[allowNull] =>
[dbType] => smallint(6) unsigned
[type] => integer
[defaultValue] => 0
[size] => 6
[precision] => 6
[scale] =>
[isPrimaryKey] =>
[isForeignKey] =>
[autoIncrement] =>
[comment] => 分类id
[_e:CComponent:private] =>
[_m:CComponent:private] =>
)
[title] => CMysqlColumnSchema Object
(
[name] => title
[rawName] => `title`
[allowNull] => 1
[dbType] => varchar(255)
[type] => string
[defaultValue] =>
[size] => 255
[precision] => 255
[scale] =>
[isPrimaryKey] =>
[isForeignKey] =>
[autoIncrement] =>
[comment] => 标题
[_e:CComponent:private] =>
[_m:CComponent:private] =>
)
[title_pic] => CMysqlColumnSchema Object
(
[name] => title_pic
[rawName] => `title_pic`
[allowNull] => 1
[dbType] => varchar(255)
[type] => string
[defaultValue] =>
[size] => 255
[precision] => 255
[scale] =>
[isPrimaryKey] =>
[isForeignKey] =>
[autoIncrement] =>
[comment] => 标题图片
[_e:CComponent:private] =>
[_m:CComponent:private] =>
)
[intro] => CMysqlColumnSchema Object
(
[name] => intro
[rawName] => `intro`
[allowNull] => 1
[dbType] => text
[type] => string
[defaultValue] =>
[size] =>
[precision] =>
[scale] =>
[isPrimaryKey] =>
[isForeignKey] =>
[autoIncrement] =>
[comment] => 简介
[_e:CComponent:private] =>
[_m:CComponent:private] =>
)
[source] => CMysqlColumnSchema Object
(
[name] => source
[rawName] => `source`
[allowNull] => 1
[dbType] => varchar(255)
[type] => string
[defaultValue] =>
[size] => 255
[precision] => 255
[scale] =>
[isPrimaryKey] =>
[isForeignKey] =>
[autoIncrement] =>
[comment] => 来源
[_e:CComponent:private] =>
[_m:CComponent:private] =>
)
[source_link] => CMysqlColumnSchema Object
(
[name] => source_link
[rawName] => `source_link`
[allowNull] => 1
[dbType] => varchar(255)
[type] => string
[defaultValue] =>
[size] => 255
[precision] => 255
[scale] =>
[isPrimaryKey] =>
[isForeignKey] =>
[autoIncrement] =>
[comment] => 来源链接
[_e:CComponent:private] =>
[_m:CComponent:private] =>
)
[author] => CMysqlColumnSchema Object
(
[name] => author
[rawName] => `author`
[allowNull] => 1
[dbType] => varchar(255)
[type] => string
[defaultValue] =>
[size] => 255
[precision] => 255
[scale] =>
[isPrimaryKey] =>
[isForeignKey] =>
[autoIncrement] =>
[comment] => 作者
[_e:CComponent:private] =>
[_m:CComponent:private] =>
)
[editor] => CMysqlColumnSchema Object
(
[name] => editor
[rawName] => `editor`
[allowNull] => 1
[dbType] => varchar(255)
[type] => string
[defaultValue] =>
[size] => 255
[precision] => 255
[scale] =>
[isPrimaryKey] =>
[isForeignKey] =>
[autoIncrement] =>
[comment] => 编辑
[_e:CComponent:private] =>
[_m:CComponent:private] =>
)
[admin_id] => CMysqlColumnSchema Object
(
[name] => admin_id
[rawName] => `admin_id`
[allowNull] =>
[dbType] => int(10) unsigned
[type] => string
[defaultValue] => 0
[size] => 10
[precision] => 10
[scale] =>
[isPrimaryKey] =>
[isForeignKey] =>
[autoIncrement] =>
[comment] => 管理员id
[_e:CComponent:private] =>
[_m:CComponent:private] =>
)
[content] => CMysqlColumnSchema Object
(
[name] => content
[rawName] => `content`
[allowNull] => 1
[dbType] => text
[type] => string
[defaultValue] =>
[size] =>
[precision] =>
[scale] =>
[isPrimaryKey] =>
[isForeignKey] =>
[autoIncrement] =>
[comment] => 内容
[_e:CComponent:private] =>
[_m:CComponent:private] =>
)
[created_at] => CMysqlColumnSchema Object
(
[name] => created_at
[rawName] => `created_at`
[allowNull] =>
[dbType] => datetime
[type] => string
[defaultValue] => 0000-00-00 00:00:00
[size] =>
[precision] =>
[scale] =>
[isPrimaryKey] =>
[isForeignKey] =>
[autoIncrement] =>
[comment] => 创建日期
[_e:CComponent:private] =>
[_m:CComponent:private] =>
)
[updated_at] => CMysqlColumnSchema Object
(
[name] => updated_at
[rawName] => `updated_at`
[allowNull] =>
[dbType] => datetime
[type] => string
[defaultValue] => 0000-00-00 00:00:00
[size] =>
[precision] =>
[scale] =>
[isPrimaryKey] =>
[isForeignKey] =>
[autoIncrement] =>
[comment] => 更新日期
[_e:CComponent:private] =>
[_m:CComponent:private] =>
)
[published_at] => CMysqlColumnSchema Object
(
[name] => published_at
[rawName] => `published_at`
[allowNull] =>
[dbType] => datetime
[type] => string
[defaultValue] => 0000-00-00 00:00:00
[size] =>
[precision] =>
[scale] =>
[isPrimaryKey] =>
[isForeignKey] =>
[autoIncrement] =>
[comment] => 发布日期
[_e:CComponent:private] =>
[_m:CComponent:private] =>
)
[status] => CMysqlColumnSchema Object
(
[name] => status
[rawName] => `status`
[allowNull] =>
[dbType] => tinyint(1) unsigned
[type] => integer
[defaultValue] => 0
[size] => 1
[precision] => 1
[scale] =>
[isPrimaryKey] =>
[isForeignKey] =>
[autoIncrement] =>
[comment] => 状态
[_e:CComponent:private] =>
[_m:CComponent:private] =>
)
[sticky] => CMysqlColumnSchema Object
(
[name] => sticky
[rawName] => `sticky`
[allowNull] =>
[dbType] => tinyint(1) unsigned
[type] => integer
[defaultValue] => 0
[size] => 1
[precision] => 1
[scale] =>
[isPrimaryKey] =>
[isForeignKey] =>
[autoIncrement] =>
[comment] => 推荐
[_e:CComponent:private] =>
[_m:CComponent:private] =>
)
[display_order] => CMysqlColumnSchema Object
(
[name] => display_order
[rawName] => `display_order`
[allowNull] =>
[dbType] => smallint(6) unsigned
[type] => integer
[defaultValue] => 0
[size] => 6
[precision] => 6
[scale] =>
[isPrimaryKey] =>
[isForeignKey] =>
[autoIncrement] =>
[comment] => 排序
[_e:CComponent:private] =>
[_m:CComponent:private] =>
)
[article_type] => CMysqlColumnSchema Object
(
[name] => article_type
[rawName] => `article_type`
[allowNull] => 1
[dbType] => varchar(255)
[type] => string
[defaultValue] =>
[size] => 255
[precision] => 255
[scale] =>
[isPrimaryKey] =>
[isForeignKey] =>
[autoIncrement] =>
[comment] => 文章类型
[_e:CComponent:private] =>
[_m:CComponent:private] =>
)
[language] => CMysqlColumnSchema Object
(
[name] => language
[rawName] => `language`
[allowNull] => 1
[dbType] => varchar(20)
[type] => string
[defaultValue] =>
[size] => 20
[precision] => 20
[scale] =>
[isPrimaryKey] =>
[isForeignKey] =>
[autoIncrement] =>
[comment] =>
[_e:CComponent:private] =>
[_m:CComponent:private] =>
)
[subtitle] => CMysqlColumnSchema Object
(
[name] => subtitle
[rawName] => `subtitle`
[allowNull] => 1
[dbType] => varchar(255)
[type] => string
[defaultValue] =>
[size] => 255
[precision] => 255
[scale] =>
[isPrimaryKey] =>
[isForeignKey] =>
[autoIncrement] =>
[comment] =>
[_e:CComponent:private] =>
[_m:CComponent:private] =>
)
[file] => CMysqlColumnSchema Object
(
[name] => file
[rawName] => `file`
[allowNull] => 1
[dbType] => varchar(255)
[type] => string
[defaultValue] =>
[size] => 255
[precision] => 255
[scale] =>
[isPrimaryKey] =>
[isForeignKey] =>
[autoIncrement] =>
[comment] =>
[_e:CComponent:private] =>
[_m:CComponent:private] =>
)
[is_oauth] => CMysqlColumnSchema Object
(
[name] => is_oauth
[rawName] => `is_oauth`
[allowNull] =>
[dbType] => tinyint(1) unsigned
[type] => integer
[defaultValue] => 0
[size] => 1
[precision] => 1
[scale] =>
[isPrimaryKey] =>
[isForeignKey] =>
[autoIncrement] =>
[comment] => 是否需要认证(0为不限制)
[_e:CComponent:private] =>
[_m:CComponent:private] =>
)
[is_highlight] => CMysqlColumnSchema Object
(
[name] => is_highlight
[rawName] => `is_highlight`
[allowNull] =>
[dbType] => tinyint(1) unsigned
[type] => integer
[defaultValue] => 0
[size] => 1
[precision] => 1
[scale] =>
[isPrimaryKey] =>
[isForeignKey] =>
[autoIncrement] =>
[comment] => 是否高亮
[_e:CComponent:private] =>
[_m:CComponent:private] =>
)
)
[_e:CComponent:private] =>
[_m:CComponent:private] =>
)
[columns] => Array
(
[id] => CMysqlColumnSchema Object
(
[name] => id
[rawName] => `id`
[allowNull] =>
[dbType] => int(10) unsigned
[type] => string
[defaultValue] =>
[size] => 10
[precision] => 10
[scale] =>
[isPrimaryKey] => 1
[isForeignKey] =>
[autoIncrement] => 1
[comment] =>
[_e:CComponent:private] =>
[_m:CComponent:private] =>
)
[sort_id] => CMysqlColumnSchema Object
(
[name] => sort_id
[rawName] => `sort_id`
[allowNull] =>
[dbType] => smallint(6) unsigned
[type] => integer
[defaultValue] => 0
[size] => 6
[precision] => 6
[scale] =>
[isPrimaryKey] =>
[isForeignKey] =>
[autoIncrement] =>
[comment] => 分类id
[_e:CComponent:private] =>
[_m:CComponent:private] =>
)
[title] => CMysqlColumnSchema Object
(
[name] => title
[rawName] => `title`
[allowNull] => 1
[dbType] => varchar(255)
[type] => string
[defaultValue] =>
[size] => 255
[precision] => 255
[scale] =>
[isPrimaryKey] =>
[isForeignKey] =>
[autoIncrement] =>
[comment] => 标题
[_e:CComponent:private] =>
[_m:CComponent:private] =>
)
[title_pic] => CMysqlColumnSchema Object
(
[name] => title_pic
[rawName] => `title_pic`
[allowNull] => 1
[dbType] => varchar(255)
[type] => string
[defaultValue] =>
[size] => 255
[precision] => 255
[scale] =>
[isPrimaryKey] =>
[isForeignKey] =>
[autoIncrement] =>
[comment] => 标题图片
[_e:CComponent:private] =>
[_m:CComponent:private] =>
)
[intro] => CMysqlColumnSchema Object
(
[name] => intro
[rawName] => `intro`
[allowNull] => 1
[dbType] => text
[type] => string
[defaultValue] =>
[size] =>
[precision] =>
[scale] =>
[isPrimaryKey] =>
[isForeignKey] =>
[autoIncrement] =>
[comment] => 简介
[_e:CComponent:private] =>
[_m:CComponent:private] =>
)
[source] => CMysqlColumnSchema Object
(
[name] => source
[rawName] => `source`
[allowNull] => 1
[dbType] => varchar(255)
[type] => string
[defaultValue] =>
[size] => 255
[precision] => 255
[scale] =>
[isPrimaryKey] =>
[isForeignKey] =>
[autoIncrement] =>
[comment] => 来源
[_e:CComponent:private] =>
[_m:CComponent:private] =>
)
[source_link] => CMysqlColumnSchema Object
(
[name] => source_link
[rawName] => `source_link`
[allowNull] => 1
[dbType] => varchar(255)
[type] => string
[defaultValue] =>
[size] => 255
[precision] => 255
[scale] =>
[isPrimaryKey] =>
[isForeignKey] =>
[autoIncrement] =>
[comment] => 来源链接
[_e:CComponent:private] =>
[_m:CComponent:private] =>
)
[author] => CMysqlColumnSchema Object
(
[name] => author
[rawName] => `author`
[allowNull] => 1
[dbType] => varchar(255)
[type] => string
[defaultValue] =>
[size] => 255
[precision] => 255
[scale] =>
[isPrimaryKey] =>
[isForeignKey] =>
[autoIncrement] =>
[comment] => 作者
[_e:CComponent:private] =>
[_m:CComponent:private] =>
)
[editor] => CMysqlColumnSchema Object
(
[name] => editor
[rawName] => `editor`
[allowNull] => 1
[dbType] => varchar(255)
[type] => string
[defaultValue] =>
[size] => 255
[precision] => 255
[scale] =>
[isPrimaryKey] =>
[isForeignKey] =>
[autoIncrement] =>
[comment] => 编辑
[_e:CComponent:private] =>
[_m:CComponent:private] =>
)
[admin_id] => CMysqlColumnSchema Object
(
[name] => admin_id
[rawName] => `admin_id`
[allowNull] =>
[dbType] => int(10) unsigned
[type] => string
[defaultValue] => 0
[size] => 10
[precision] => 10
[scale] =>
[isPrimaryKey] =>
[isForeignKey] =>
[autoIncrement] =>
[comment] => 管理员id
[_e:CComponent:private] =>
[_m:CComponent:private] =>
)
[content] => CMysqlColumnSchema Object
(
[name] => content
[rawName] => `content`
[allowNull] => 1
[dbType] => text
[type] => string
[defaultValue] =>
[size] =>
[precision] =>
[scale] =>
[isPrimaryKey] =>
[isForeignKey] =>
[autoIncrement] =>
[comment] => 内容
[_e:CComponent:private] =>
[_m:CComponent:private] =>
)
[created_at] => CMysqlColumnSchema Object
(
[name] => created_at
[rawName] => `created_at`
[allowNull] =>
[dbType] => datetime
[type] => string
[defaultValue] => 0000-00-00 00:00:00
[size] =>
[precision] =>
[scale] =>
[isPrimaryKey] =>
[isForeignKey] =>
[autoIncrement] =>
[comment] => 创建日期
[_e:CComponent:private] =>
[_m:CComponent:private] =>
)
[updated_at] => CMysqlColumnSchema Object
(
[name] => updated_at
[rawName] => `updated_at`
[allowNull] =>
[dbType] => datetime
[type] => string
[defaultValue] => 0000-00-00 00:00:00
[size] =>
[precision] =>
[scale] =>
[isPrimaryKey] =>
[isForeignKey] =>
[autoIncrement] =>
[comment] => 更新日期
[_e:CComponent:private] =>
[_m:CComponent:private] =>
)
[published_at] => CMysqlColumnSchema Object
(
[name] => published_at
[rawName] => `published_at`
[allowNull] =>
[dbType] => datetime
[type] => string
[defaultValue] => 0000-00-00 00:00:00
[size] =>
[precision] =>
[scale] =>
[isPrimaryKey] =>
[isForeignKey] =>
[autoIncrement] =>
[comment] => 发布日期
[_e:CComponent:private] =>
[_m:CComponent:private] =>
)
[status] => CMysqlColumnSchema Object
(
[name] => status
[rawName] => `status`
[allowNull] =>
[dbType] => tinyint(1) unsigned
[type] => integer
[defaultValue] => 0
[size] => 1
[precision] => 1
[scale] =>
[isPrimaryKey] =>
[isForeignKey] =>
[autoIncrement] =>
[comment] => 状态
[_e:CComponent:private] =>
[_m:CComponent:private] =>
)
[sticky] => CMysqlColumnSchema Object
(
[name] => sticky
[rawName] => `sticky`
[allowNull] =>
[dbType] => tinyint(1) unsigned
[type] => integer
[defaultValue] => 0
[size] => 1
[precision] => 1
[scale] =>
[isPrimaryKey] =>
[isForeignKey] =>
[autoIncrement] =>
[comment] => 推荐
[_e:CComponent:private] =>
[_m:CComponent:private] =>
)
[display_order] => CMysqlColumnSchema Object
(
[name] => display_order
[rawName] => `display_order`
[allowNull] =>
[dbType] => smallint(6) unsigned
[type] => integer
[defaultValue] => 0
[size] => 6
[precision] => 6
[scale] =>
[isPrimaryKey] =>
[isForeignKey] =>
[autoIncrement] =>
[comment] => 排序
[_e:CComponent:private] =>
[_m:CComponent:private] =>
)
[article_type] => CMysqlColumnSchema Object
(
[name] => article_type
[rawName] => `article_type`
[allowNull] => 1
[dbType] => varchar(255)
[type] => string
[defaultValue] =>
[size] => 255
[precision] => 255
[scale] =>
[isPrimaryKey] =>
[isForeignKey] =>
[autoIncrement] =>
[comment] => 文章类型
[_e:CComponent:private] =>
[_m:CComponent:private] =>
)
[language] => CMysqlColumnSchema Object
(
[name] => language
[rawName] => `language`
[allowNull] => 1
[dbType] => varchar(20)
[type] => string
[defaultValue] =>
[size] => 20
[precision] => 20
[scale] =>
[isPrimaryKey] =>
[isForeignKey] =>
[autoIncrement] =>
[comment] =>
[_e:CComponent:private] =>
[_m:CComponent:private] =>
)
[subtitle] => CMysqlColumnSchema Object
(
[name] => subtitle
[rawName] => `subtitle`
[allowNull] => 1
[dbType] => varchar(255)
[type] => string
[defaultValue] =>
[size] => 255
[precision] => 255
[scale] =>
[isPrimaryKey] =>
[isForeignKey] =>
[autoIncrement] =>
[comment] =>
[_e:CComponent:private] =>
[_m:CComponent:private] =>
)
[file] => CMysqlColumnSchema Object
(
[name] => file
[rawName] => `file`
[allowNull] => 1
[dbType] => varchar(255)
[type] => string
[defaultValue] =>
[size] => 255
[precision] => 255
[scale] =>
[isPrimaryKey] =>
[isForeignKey] =>
[autoIncrement] =>
[comment] =>
[_e:CComponent:private] =>
[_m:CComponent:private] =>
)
[is_oauth] => CMysqlColumnSchema Object
(
[name] => is_oauth
[rawName] => `is_oauth`
[allowNull] =>
[dbType] => tinyint(1) unsigned
[type] => integer
[defaultValue] => 0
[size] => 1
[precision] => 1
[scale] =>
[isPrimaryKey] =>
[isForeignKey] =>
[autoIncrement] =>
[comment] => 是否需要认证(0为不限制)
[_e:CComponent:private] =>
[_m:CComponent:private] =>
)
[is_highlight] => CMysqlColumnSchema Object
(
[name] => is_highlight
[rawName] => `is_highlight`
[allowNull] =>
[dbType] => tinyint(1) unsigned
[type] => integer
[defaultValue] => 0
[size] => 1
[precision] => 1
[scale] =>
[isPrimaryKey] =>
[isForeignKey] =>
[autoIncrement] =>
[comment] => 是否高亮
[_e:CComponent:private] =>
[_m:CComponent:private] =>
)
)
[relations] => Array
(
[Admin] => CBelongsToRelation Object
(
[joinType] => LEFT OUTER JOIN
[on] =>
[alias] =>
[with] => Array
(
)
[together] =>
[scopes] =>
[name] => Admin
[className] => Admin
[foreignKey] => Array
(
[admin_id] => id
)
[select] => *
[condition] =>
[params] => Array
(
)
[group] =>
[join] =>
[having] =>
[order] =>
[_e:CComponent:private] =>
[_m:CComponent:private] =>
)
[Sort] => CBelongsToRelation Object
(
[joinType] => LEFT OUTER JOIN
[on] =>
[alias] =>
[with] => Array
(
)
[together] =>
[scopes] =>
[name] => Sort
[className] => Sort
[foreignKey] => Array
(
[sort_id] => id
)
[select] => *
[condition] =>
[params] => Array
(
)
[group] =>
[join] =>
[having] =>
[order] =>
[_e:CComponent:private] =>
[_m:CComponent:private] =>
)
)
[attributeDefaults] => Array
(
[sort_id] => 0
[admin_id] => 0
[created_at] => 0000-00-00 00:00:00
[updated_at] => 0000-00-00 00:00:00
[published_at] => 0000-00-00 00:00:00
[status] => 0
[sticky] => 0
[display_order] => 0
[is_oauth] => 0
[is_highlight] => 0
)
[_model:CActiveRecordMetaData:private] => Article Object
(
[_status:protected] =>
[_sticky:protected] =>
[_md:CActiveRecord:private] => CActiveRecordMetaData Object
*RECURSION*
[_new:CActiveRecord:private] =>
[_attributes:CActiveRecord:private] => Array
(
)
[_related:CActiveRecord:private] => Array
(
)
[_c:CActiveRecord:private] =>
[_pk:CActiveRecord:private] =>
[_alias:CActiveRecord:private] => t
[_errors:CModel:private] => Array
(
)
[_validators:CModel:private] =>
[_scenario:CModel:private] =>
[_e:CComponent:private] =>
[_m:CComponent:private] =>
)
)
[_new:CActiveRecord:private] =>
[_attributes:CActiveRecord:private] => Array
(
[id] => 5577
[title] => 超高真空变温扫描隧道显微镜采购项目采购需求公示
[sort_id] => 56
[published_at] => 2020-09-25 12:33:34
)
[_related:CActiveRecord:private] => Array
(
)
[_c:CActiveRecord:private] =>
[_pk:CActiveRecord:private] => 5577
[_alias:CActiveRecord:private] => t
[_errors:CModel:private] => Array
(
)
[_validators:CModel:private] =>
[_scenario:CModel:private] => update
[_e:CComponent:private] =>
[_m:CComponent:private] =>
)
材料基因芯片制备工艺模块等设备采购项目采购需求公示
2020-09-14(一)项目基本信息
|
项目名称 |
材料基因芯片制备工艺模块等设备采购 |
|
采购预算(元) |
630万元 |
|
是否接受进口设备 |
否 |
(二)货物清单
|
序号 |
设备名称 |
数量 |
单位 |
|
1 |
材料基因芯片制备工艺模块 |
1 |
套 |
|
2 |
连续掩膜模块 |
1 |
套 |
|
3 |
分立掩膜模块 |
1 |
套 |
|
4 |
多元材料电子束蒸发源 |
1 |
套 |
|
5 |
材料基因芯片转移过渡腔 |
1 |
套 |
|
6 |
多样品超高真空更换模块 |
1 |
套 |
|
7 |
多靶材更换模块 |
1 |
套 |
(三)商务需求
|
序号 |
商务需求 |
|
1 |
交货期的要求:签订合同后120天内。 |
|
2 |
质保期:1年 |
|
3 |
付款方式:合同生效并收到相应发票后支付合同总额的30%作为进度款;设备到达指定安装现场且安装、调试验收合格并提供全额发票后支付合同总额的65%;余款5%待质保期满且无质量问题并经学校确认后支付 |
(四)技术需求
|
序号 |
设备名称 |
技术参数或功能要求 |
|
1 |
材料基因芯片制备工艺模块 |
|
|
1.2基片直径 ≥ 4 inch,膜厚均匀性优于±3% |
||
|
1.3电控气动真空阀,全量程真空规 |
||
|
1.4 材料基因芯片制备过程操作模式:手动、自动、和维护 |
||
|
1.5▲可以制备5元及以上组合材料芯片,三元及三元以上连续镀膜材料基因芯片,三元及三元以上阶梯镀膜材料基因芯片 |
||
|
1.6抽真空系统:低温泵和离子泵,各腔体之间使用高真空插板阀连接;机械真空泵和腔体使用电控气动真空阀连接 |
||
|
1.7系统文件:一个包含系统文件U盘 (操作手册,机械图,电路图) |
||
|
1.8▲系统电控和自动控制:1 )制备工艺使用PLC+触摸屏实现自动化控制;2)控制模块化;3)提供控制软件;4)带平板显示器,显示系统运行的状态、数据、和警告;5)记录所有系统自动运行时的数据,工艺数据采集频率 < 1s |
||
|
1.9电控系统:1) 3相电源的输入和控制;2)真空系统自锁; 3)各真空腔内的机械传动系统的限位; 4)电子束蒸发源系统的保护; 5)真空系统保护; 6)报警 :失水, 失气, 过压,过流 ,温度 |
||
|
2 |
连续掩膜模块 |
2.1使用314不锈钢制造,元件表面进行抛光,满足10^-8 torr 真空设计要求 |
|
2.2▲步进精度≤10μm,移动速度:0~2.5 mm/s 可调 |
||
|
2.3成分分布连续,0-100%成分分布范围可控 |
||
|
2.4▲分辨率可达0.1% |
||
|
2.5 ★含1套固定掩膜装置 |
||
|
3 |
分立掩膜模块 |
3.1▲样品台旋转角度0-360°,样品台旋转精度≤0.0002° |
|
3.2▲掩模转角定位精度≤0.0002° |
||
|
3.3▲掩模中心定位精度≤10 μm |
||
|
3.4单个沉积微区边长≤1mm,组合通量 ≥ 200 |
||
|
3.5▲掩膜板尺寸可以根据需求在1-4英寸之间变化 |
||
|
3.6▲系统掩膜板数量可以根据需要增加 |
||
|
4 |
多元材料电子束蒸发源 |
4.1功率≥6 kW, |
|
4.2连续蒸发材料种类 ≥ 6 |
||
|
4.3单层薄膜最小厚度1 nm的连续沉积 |
||
|
4.4膜厚均匀性优于±3% |
||
|
4.5▲ UHV电子束蒸发源 |
||
|
5 |
材料基因芯片转移过渡腔 |
5.1▲真空度优于5E-10 Torr |
|
5.2▲样品定位精度 ≤ 1μm |
||
|
5.3材料基因芯片转移自动化 |
||
|
6 |
多样品超高真空更换模块 |
6.1真空度优于5E-6 Torr |
|
6.2自动向转移腔取送样品 |
||
|
6.3 样品溅射清洗 |
||
|
7 |
多靶材更换模块 |
7.1水含量≤ 1ppm, |
|
7.2氧含量≤1 ppm |
||
|
7.3泄漏率< 0.001 vol%/h |
||
|
7.4 ★机械手更换蒸发材料 |
(五)公示期限
2020年9月14日至2020年9月19日
对公示内容有异议的,请在公示期内以书面形式将意见反馈至采购人。
联系人:吴老师
联系电话:0755-88015306
质疑投诉邮箱:zhaobzyts@sustech.edu.cn
上一篇 : 超高真空变温扫描隧道显微镜采购项目采购需求公示
© 2009-2024 All Rights Reserved. 粤ICP备14051456号
地址:深圳市南山区学苑大道1088号南方科技大学创园4栋203室 电话:0755-88018567 邮编:518055